JPS57183050A - Integrated circuit - Google Patents
Integrated circuitInfo
- Publication number
- JPS57183050A JPS57183050A JP6733681A JP6733681A JPS57183050A JP S57183050 A JPS57183050 A JP S57183050A JP 6733681 A JP6733681 A JP 6733681A JP 6733681 A JP6733681 A JP 6733681A JP S57183050 A JPS57183050 A JP S57183050A
- Authority
- JP
- Japan
- Prior art keywords
- insulating film
- field insulating
- film
- wiring
- wiring part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To reduce the parasitic capacity of the wiring part by a method wherein the field insulating film of the wiring part is formed thicker than the field insulating film of the cell part. CONSTITUTION:The field insulating film 12 and the field insulating film 13 are respectively formed on the cell part side Ce and the wiring part side Lw on the semiconductor substrate 11 while the wirings 14 and 15 are respectively formed on said insulating films 12 and 13. In this case, the film 13 is formed thicker than the film 12. Through these procedures, the deterioration of the characteristics such as the lowering of switching speed due to the tendency of larger scaled IC may be avoided, because the increase of the parasitic capacity due to the extended wiring can be restrained.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6733681A JPS57183050A (en) | 1981-05-02 | 1981-05-02 | Integrated circuit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6733681A JPS57183050A (en) | 1981-05-02 | 1981-05-02 | Integrated circuit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57183050A true JPS57183050A (en) | 1982-11-11 |
Family
ID=13342065
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6733681A Pending JPS57183050A (en) | 1981-05-02 | 1981-05-02 | Integrated circuit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57183050A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61224340A (en) * | 1985-03-29 | 1986-10-06 | Agency Of Ind Science & Technol | Semiconductor device and manufacture thereof |
JP2008148453A (en) * | 2006-12-11 | 2008-06-26 | Mitsubishi Electric Corp | Insulation ring and rotary electric machine |
-
1981
- 1981-05-02 JP JP6733681A patent/JPS57183050A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61224340A (en) * | 1985-03-29 | 1986-10-06 | Agency Of Ind Science & Technol | Semiconductor device and manufacture thereof |
JPH0587974B2 (en) * | 1985-03-29 | 1993-12-20 | Kogyo Gijutsuin | |
JP2008148453A (en) * | 2006-12-11 | 2008-06-26 | Mitsubishi Electric Corp | Insulation ring and rotary electric machine |
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