JPS5352387A - Semiconductor integrated circuit - Google Patents

Semiconductor integrated circuit

Info

Publication number
JPS5352387A
JPS5352387A JP12763776A JP12763776A JPS5352387A JP S5352387 A JPS5352387 A JP S5352387A JP 12763776 A JP12763776 A JP 12763776A JP 12763776 A JP12763776 A JP 12763776A JP S5352387 A JPS5352387 A JP S5352387A
Authority
JP
Japan
Prior art keywords
integrated circuit
semiconductor integrated
prevented
wiring
wirings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12763776A
Other languages
Japanese (ja)
Inventor
Koichi Oguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP12763776A priority Critical patent/JPS5352387A/en
Publication of JPS5352387A publication Critical patent/JPS5352387A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: In a multilayer wiring structure IC, an aluminum-silicon alloy is used for at least one or more wiring layers, whereby the punch-through phenomenon owing to the reaction between the substrate and the thin wiring films is prevented and the disconnection of wirings is also prevented.
COPYRIGHT: (C)1978,JPO&Japio
JP12763776A 1976-10-23 1976-10-23 Semiconductor integrated circuit Pending JPS5352387A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12763776A JPS5352387A (en) 1976-10-23 1976-10-23 Semiconductor integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12763776A JPS5352387A (en) 1976-10-23 1976-10-23 Semiconductor integrated circuit

Publications (1)

Publication Number Publication Date
JPS5352387A true JPS5352387A (en) 1978-05-12

Family

ID=14965012

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12763776A Pending JPS5352387A (en) 1976-10-23 1976-10-23 Semiconductor integrated circuit

Country Status (1)

Country Link
JP (1) JPS5352387A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08102493A (en) * 1995-04-27 1996-04-16 Sanyo Electric Co Ltd Semiconductor integrated circuit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08102493A (en) * 1995-04-27 1996-04-16 Sanyo Electric Co Ltd Semiconductor integrated circuit

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