JPS52104089A - Semiconductor unit - Google Patents

Semiconductor unit

Info

Publication number
JPS52104089A
JPS52104089A JP2084576A JP2084576A JPS52104089A JP S52104089 A JPS52104089 A JP S52104089A JP 2084576 A JP2084576 A JP 2084576A JP 2084576 A JP2084576 A JP 2084576A JP S52104089 A JPS52104089 A JP S52104089A
Authority
JP
Japan
Prior art keywords
polycrystalline
semiconductor unit
insulating film
wiring layer
providing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2084576A
Other languages
Japanese (ja)
Inventor
Taiichi Inoue
Yoshiaki Yadoiwa
Shoji Fujimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP2084576A priority Critical patent/JPS52104089A/en
Publication of JPS52104089A publication Critical patent/JPS52104089A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Drying Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)

Abstract

PURPOSE: To prevent alloy spike in Al and polycrystalline Si dual structure wiring by providing an insulation film having a slower etching speed than that of polycrystalline Si etching liquid between the insulating film and wiring layer when forming polycrystalline Si metal wiring layer of the insulating film provided on a semiconductor base.
COPYRIGHT: (C)1977,JPO&Japio
JP2084576A 1976-02-27 1976-02-27 Semiconductor unit Pending JPS52104089A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2084576A JPS52104089A (en) 1976-02-27 1976-02-27 Semiconductor unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2084576A JPS52104089A (en) 1976-02-27 1976-02-27 Semiconductor unit

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP1602486A Division JPS6211250A (en) 1986-01-27 1986-01-27 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS52104089A true JPS52104089A (en) 1977-09-01

Family

ID=12038404

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2084576A Pending JPS52104089A (en) 1976-02-27 1976-02-27 Semiconductor unit

Country Status (1)

Country Link
JP (1) JPS52104089A (en)

Similar Documents

Publication Publication Date Title
JPS5378789A (en) Manufacture of semiconductor integrated circuit
JPS52143785A (en) Semiconductor device
JPS52104089A (en) Semiconductor unit
JPS52102691A (en) Formation of wiring on insulating layer having steps
JPS5268388A (en) Semiconductor integrated circuit
JPS5245270A (en) Semiconductor device
JPS5289468A (en) Semiconductor device
JPS5380183A (en) Semiconductor device
JPS52155986A (en) Semiconductor device
JPS5333077A (en) Semiconductor integrated circuit
JPS5391591A (en) Semiconductor device
JPS5317287A (en) Production of semiconductor device
JPS5353989A (en) Production of semiconductor device
JPS5361348A (en) Thermal element for typing
JPS5319774A (en) Semiconductor integrated circuit
JPS5289467A (en) Semiconductor device
JPS52117590A (en) Semiconductor device
JPS5367386A (en) Semiconductor device
JPS5246765A (en) Method of producing semiconductor device
JPS5352387A (en) Semiconductor integrated circuit
JPS53117985A (en) Semiconductor device
JPS539489A (en) Production of semiconductor device
JPS5257788A (en) Semiconductor device
JPS52125285A (en) Semiconductor device
JPS5376681A (en) Production of semiconductor integrated circuit device