JPH0583517B2 - - Google Patents

Info

Publication number
JPH0583517B2
JPH0583517B2 JP63077595A JP7759588A JPH0583517B2 JP H0583517 B2 JPH0583517 B2 JP H0583517B2 JP 63077595 A JP63077595 A JP 63077595A JP 7759588 A JP7759588 A JP 7759588A JP H0583517 B2 JPH0583517 B2 JP H0583517B2
Authority
JP
Japan
Prior art keywords
graphite
silicon carbide
silicon
base material
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP63077595A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01249679A (ja
Inventor
Akira Nogami
Tooru Hoshikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyo Tanso Co Ltd
Original Assignee
Toyo Tanso Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyo Tanso Co Ltd filed Critical Toyo Tanso Co Ltd
Priority to JP63077595A priority Critical patent/JPH01249679A/ja
Publication of JPH01249679A publication Critical patent/JPH01249679A/ja
Publication of JPH0583517B2 publication Critical patent/JPH0583517B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/5053—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials non-oxide ceramics
    • C04B41/5057—Carbides
    • C04B41/5059—Silicon carbide

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Products (AREA)
JP63077595A 1988-03-29 1988-03-29 黒鉛一炭化珪素複合体並びにその製造法 Granted JPH01249679A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63077595A JPH01249679A (ja) 1988-03-29 1988-03-29 黒鉛一炭化珪素複合体並びにその製造法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63077595A JPH01249679A (ja) 1988-03-29 1988-03-29 黒鉛一炭化珪素複合体並びにその製造法

Publications (2)

Publication Number Publication Date
JPH01249679A JPH01249679A (ja) 1989-10-04
JPH0583517B2 true JPH0583517B2 (enrdf_load_stackoverflow) 1993-11-26

Family

ID=13638311

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63077595A Granted JPH01249679A (ja) 1988-03-29 1988-03-29 黒鉛一炭化珪素複合体並びにその製造法

Country Status (1)

Country Link
JP (1) JPH01249679A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000319080A (ja) * 1999-05-07 2000-11-21 Tokai Carbon Co Ltd 炭化珪素被覆黒鉛部材
JP4641535B2 (ja) * 2007-07-27 2011-03-02 東洋炭素株式会社 還元性雰囲気炉用炭素複合材料及びその製造方法
JP4641536B2 (ja) * 2007-07-27 2011-03-02 東洋炭素株式会社 還元性雰囲気炉用炭素複合材料及びその製造方法
CN102220108A (zh) * 2011-01-12 2011-10-19 江西赛维Ldk太阳能高科技有限公司 一种用于多晶硅生产领域的防止硅液漏流用堵漏剂
CN108028267A (zh) 2015-08-20 2018-05-11 恩特格里斯公司 碳化硅/石墨复合物与包括所述复合物的物件及组合件

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4826597A (enrdf_load_stackoverflow) * 1971-08-04 1973-04-07
US3925577A (en) * 1972-11-24 1975-12-09 Westinghouse Electric Corp Silicon carbide coated graphite members and process for producing the same
JPS5180317A (enrdf_load_stackoverflow) * 1975-01-07 1976-07-13 Tokai Carbon Kk
JPS5318613A (en) * 1976-08-04 1978-02-21 Kowa Kogyo Method of preventing oxidation of graphite products and oxidation prevented products
JPS5530043A (en) * 1978-08-23 1980-03-03 Noboru Nakamura Cylinder lock and alarm system therefor
JPS5684381A (en) * 1979-12-04 1981-07-09 Toshiba Ceramics Co Carbon silicate material
JPS56145180A (en) * 1980-04-10 1981-11-11 Hitachi Chemical Co Ltd Manufacture of silicon carbide clad carbon material
JPS578797A (en) * 1981-03-24 1982-01-18 Nippon Shoji Kk Method and reagent for quantitative determination of free fatty acid
US4617232A (en) * 1982-04-15 1986-10-14 Kennecott Corporation Corrosion and wear resistant graphite material
JPS62297467A (ja) * 1986-06-18 1987-12-24 Fujitsu Ltd 炭化ケイ素被膜形成方法

Also Published As

Publication number Publication date
JPH01249679A (ja) 1989-10-04

Similar Documents

Publication Publication Date Title
CN112624797A (zh) 一种石墨表面梯度碳化硅涂层及其制备方法
JPH0240033B2 (enrdf_load_stackoverflow)
KR100427118B1 (ko) 열처리용지그및그제조방법
EP0340802B1 (en) Silicon carbide diffusion tube for semi-conductor
JPH1012692A (ja) ダミーウエハ
EP0529593A1 (en) A glass carbon coated graphite chuck for use in producing polycrystalline silicon
JP2002003285A (ja) ＳｉＣ被覆黒鉛部材およびその製造方法
JPH0583517B2 (enrdf_load_stackoverflow)
JP2000073171A (ja) 化学蒸着法多層ＳｉＣ膜の製造方法
JP2000302576A (ja) 炭化珪素被覆黒鉛材
JP2721678B2 (ja) β−炭化珪素成形体及びその製造法
US6881262B1 (en) Methods for forming high purity components and components formed thereby
JP3642446B2 (ja) 半導体ウエハ処理具
JPH0692761A (ja) ＣＶＤ−ＳｉＣコートＳｉ含浸ＳｉＣ製品およびその製造方法
JP2002037684A (ja) 炭化ケイ素被覆黒鉛部材の再生方法及びそれによる炭化ケイ素被覆黒鉛部材
JPH0568433B2 (enrdf_load_stackoverflow)
JP4556090B2 (ja) 炭化珪素質半導体製造装置用部材およびその製造方法
JP3739507B2 (ja) 熱処理用治具の製造方法
JP3482480B2 (ja) 耐酸化性に優れた黒鉛−炭化珪素複合体及びその製造方法
JP3925884B2 (ja) ＳｉＣ被膜の被覆方法
JPH05310487A (ja) ＳｉＣ被覆黒鉛材料の製造方法
JP2855458B2 (ja) 半導体用処理部材
JPH1135391A (ja) 炭化ケイ素被覆サセプタ−
JPS63166789A (ja) シリコン単結晶引上装置用黒鉛製ルツボとその製造方法
JPS6385076A (ja) シリコンウエハ−加熱用治具

Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term
FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20081126

Year of fee payment: 15