JPH01249679A - 黒鉛一炭化珪素複合体並びにその製造法 - Google Patents
黒鉛一炭化珪素複合体並びにその製造法Info
- Publication number
- JPH01249679A JPH01249679A JP63077595A JP7759588A JPH01249679A JP H01249679 A JPH01249679 A JP H01249679A JP 63077595 A JP63077595 A JP 63077595A JP 7759588 A JP7759588 A JP 7759588A JP H01249679 A JPH01249679 A JP H01249679A
- Authority
- JP
- Japan
- Prior art keywords
- graphite
- silicon carbide
- base material
- silicon
- thermal expansion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 58
- 239000002131 composite material Substances 0.000 title claims abstract description 24
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 59
- 239000010439 graphite Substances 0.000 claims abstract description 59
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 57
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims abstract description 48
- 239000000463 material Substances 0.000 claims abstract description 38
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 27
- 239000010703 silicon Substances 0.000 claims abstract description 27
- 239000011148 porous material Substances 0.000 claims abstract description 26
- 238000000034 method Methods 0.000 claims abstract description 11
- 239000002344 surface layer Substances 0.000 claims abstract description 5
- 238000003763 carbonization Methods 0.000 claims 1
- 238000005229 chemical vapour deposition Methods 0.000 abstract description 8
- 238000005336 cracking Methods 0.000 abstract description 7
- 238000006243 chemical reaction Methods 0.000 abstract description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 25
- 239000010410 layer Substances 0.000 description 13
- 238000000576 coating method Methods 0.000 description 10
- 239000011248 coating agent Substances 0.000 description 9
- 238000005470 impregnation Methods 0.000 description 7
- 239000000758 substrate Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 239000007789 gas Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 239000012466 permeate Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 239000002296 pyrolytic carbon Substances 0.000 description 2
- 238000001878 scanning electron micrograph Methods 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 150000004756 silanes Chemical class 0.000 description 2
- 238000011282 treatment Methods 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- VJBCNMFKFZIXHC-UHFFFAOYSA-N azanium;2-(4-methyl-5-oxo-4-propan-2-yl-1h-imidazol-2-yl)quinoline-3-carboxylate Chemical compound N.N1C(=O)C(C(C)C)(C)N=C1C1=NC2=CC=CC=C2C=C1C(O)=O VJBCNMFKFZIXHC-UHFFFAOYSA-N 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 230000000171 quenching effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
- C04B41/5053—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials non-oxide ceramics
- C04B41/5057—Carbides
- C04B41/5059—Silicon carbide
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Ceramic Products (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63077595A JPH01249679A (ja) | 1988-03-29 | 1988-03-29 | 黒鉛一炭化珪素複合体並びにその製造法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63077595A JPH01249679A (ja) | 1988-03-29 | 1988-03-29 | 黒鉛一炭化珪素複合体並びにその製造法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01249679A true JPH01249679A (ja) | 1989-10-04 |
| JPH0583517B2 JPH0583517B2 (enrdf_load_stackoverflow) | 1993-11-26 |
Family
ID=13638311
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63077595A Granted JPH01249679A (ja) | 1988-03-29 | 1988-03-29 | 黒鉛一炭化珪素複合体並びにその製造法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01249679A (enrdf_load_stackoverflow) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100715703B1 (ko) * | 1999-05-07 | 2007-05-08 | 도카이 카본 가부시키가이샤 | 탄화규소 피복 흑연 부재 |
| JP2007308369A (ja) * | 2007-07-27 | 2007-11-29 | Toyo Tanso Kk | 還元性雰囲気炉用炭素複合材料及びその製造方法 |
| JP2007308370A (ja) * | 2007-07-27 | 2007-11-29 | Toyo Tanso Kk | 還元性雰囲気炉用炭素複合材料及びその製造方法 |
| CN102220108A (zh) * | 2011-01-12 | 2011-10-19 | 江西赛维Ldk太阳能高科技有限公司 | 一种用于多晶硅生产领域的防止硅液漏流用堵漏剂 |
| JP2018530504A (ja) * | 2015-08-20 | 2018-10-18 | インテグリス・インコーポレーテッド | 炭化ケイ素／黒鉛複合材並びにそれを含む物品及び組立品 |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4826597A (enrdf_load_stackoverflow) * | 1971-08-04 | 1973-04-07 | ||
| JPS4983706A (enrdf_load_stackoverflow) * | 1972-11-24 | 1974-08-12 | ||
| JPS5180317A (enrdf_load_stackoverflow) * | 1975-01-07 | 1976-07-13 | Tokai Carbon Kk | |
| JPS5318613A (en) * | 1976-08-04 | 1978-02-21 | Kowa Kogyo | Method of preventing oxidation of graphite products and oxidation prevented products |
| JPS5530043A (en) * | 1978-08-23 | 1980-03-03 | Noboru Nakamura | Cylinder lock and alarm system therefor |
| JPS5684381A (en) * | 1979-12-04 | 1981-07-09 | Toshiba Ceramics Co | Carbon silicate material |
| JPS56145180A (en) * | 1980-04-10 | 1981-11-11 | Hitachi Chemical Co Ltd | Manufacture of silicon carbide clad carbon material |
| JPS578797A (en) * | 1981-03-24 | 1982-01-18 | Nippon Shoji Kk | Method and reagent for quantitative determination of free fatty acid |
| JPS58185488A (ja) * | 1982-04-15 | 1983-10-29 | ステンカ−・コ−ポレ−シヨン | 酸化及び侵蝕に抵抗性のある固体炭素物品及びその製造方法 |
| JPS62297467A (ja) * | 1986-06-18 | 1987-12-24 | Fujitsu Ltd | 炭化ケイ素被膜形成方法 |
-
1988
- 1988-03-29 JP JP63077595A patent/JPH01249679A/ja active Granted
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4826597A (enrdf_load_stackoverflow) * | 1971-08-04 | 1973-04-07 | ||
| JPS4983706A (enrdf_load_stackoverflow) * | 1972-11-24 | 1974-08-12 | ||
| JPS5180317A (enrdf_load_stackoverflow) * | 1975-01-07 | 1976-07-13 | Tokai Carbon Kk | |
| JPS5318613A (en) * | 1976-08-04 | 1978-02-21 | Kowa Kogyo | Method of preventing oxidation of graphite products and oxidation prevented products |
| JPS5530043A (en) * | 1978-08-23 | 1980-03-03 | Noboru Nakamura | Cylinder lock and alarm system therefor |
| JPS5684381A (en) * | 1979-12-04 | 1981-07-09 | Toshiba Ceramics Co | Carbon silicate material |
| JPS56145180A (en) * | 1980-04-10 | 1981-11-11 | Hitachi Chemical Co Ltd | Manufacture of silicon carbide clad carbon material |
| JPS578797A (en) * | 1981-03-24 | 1982-01-18 | Nippon Shoji Kk | Method and reagent for quantitative determination of free fatty acid |
| JPS58185488A (ja) * | 1982-04-15 | 1983-10-29 | ステンカ−・コ−ポレ−シヨン | 酸化及び侵蝕に抵抗性のある固体炭素物品及びその製造方法 |
| JPS62297467A (ja) * | 1986-06-18 | 1987-12-24 | Fujitsu Ltd | 炭化ケイ素被膜形成方法 |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100715703B1 (ko) * | 1999-05-07 | 2007-05-08 | 도카이 카본 가부시키가이샤 | 탄화규소 피복 흑연 부재 |
| JP2007308369A (ja) * | 2007-07-27 | 2007-11-29 | Toyo Tanso Kk | 還元性雰囲気炉用炭素複合材料及びその製造方法 |
| JP2007308370A (ja) * | 2007-07-27 | 2007-11-29 | Toyo Tanso Kk | 還元性雰囲気炉用炭素複合材料及びその製造方法 |
| CN102220108A (zh) * | 2011-01-12 | 2011-10-19 | 江西赛维Ldk太阳能高科技有限公司 | 一种用于多晶硅生产领域的防止硅液漏流用堵漏剂 |
| JP2018530504A (ja) * | 2015-08-20 | 2018-10-18 | インテグリス・インコーポレーテッド | 炭化ケイ素／黒鉛複合材並びにそれを含む物品及び組立品 |
| US11713252B2 (en) | 2015-08-20 | 2023-08-01 | Entegris, Inc. | Silicon carbide/graphite composite and articles and assemblies comprising same |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0583517B2 (enrdf_load_stackoverflow) | 1993-11-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
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| R250 | Receipt of annual fees |
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| EXPY | Cancellation because of completion of term | ||
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20081126 Year of fee payment: 15 |