JPH0579177B2 - - Google Patents

Info

Publication number
JPH0579177B2
JPH0579177B2 JP62116903A JP11690387A JPH0579177B2 JP H0579177 B2 JPH0579177 B2 JP H0579177B2 JP 62116903 A JP62116903 A JP 62116903A JP 11690387 A JP11690387 A JP 11690387A JP H0579177 B2 JPH0579177 B2 JP H0579177B2
Authority
JP
Japan
Prior art keywords
electrodes
silicide
terminal electrodes
silicon
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62116903A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63283149A (ja
Inventor
Shigeru Tooyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP62116903A priority Critical patent/JPS63283149A/ja
Publication of JPS63283149A publication Critical patent/JPS63283149A/ja
Publication of JPH0579177B2 publication Critical patent/JPH0579177B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W72/072—

Landscapes

  • Wire Bonding (AREA)
JP62116903A 1987-05-15 1987-05-15 半導体装置の製造方法 Granted JPS63283149A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62116903A JPS63283149A (ja) 1987-05-15 1987-05-15 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62116903A JPS63283149A (ja) 1987-05-15 1987-05-15 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS63283149A JPS63283149A (ja) 1988-11-21
JPH0579177B2 true JPH0579177B2 (enExample) 1993-11-01

Family

ID=14698493

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62116903A Granted JPS63283149A (ja) 1987-05-15 1987-05-15 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS63283149A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7026718B1 (en) 1998-09-25 2006-04-11 Stmicroelectronics, Inc. Stacked multi-component integrated circuit microprocessor

Also Published As

Publication number Publication date
JPS63283149A (ja) 1988-11-21

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