JPS63283149A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS63283149A
JPS63283149A JP62116903A JP11690387A JPS63283149A JP S63283149 A JPS63283149 A JP S63283149A JP 62116903 A JP62116903 A JP 62116903A JP 11690387 A JP11690387 A JP 11690387A JP S63283149 A JPS63283149 A JP S63283149A
Authority
JP
Japan
Prior art keywords
electrodes
silicide
terminal electrodes
devices
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62116903A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0579177B2 (enExample
Inventor
Shigeru Toyama
茂 遠山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP62116903A priority Critical patent/JPS63283149A/ja
Publication of JPS63283149A publication Critical patent/JPS63283149A/ja
Publication of JPH0579177B2 publication Critical patent/JPH0579177B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W72/072—

Landscapes

  • Wire Bonding (AREA)
JP62116903A 1987-05-15 1987-05-15 半導体装置の製造方法 Granted JPS63283149A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62116903A JPS63283149A (ja) 1987-05-15 1987-05-15 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62116903A JPS63283149A (ja) 1987-05-15 1987-05-15 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS63283149A true JPS63283149A (ja) 1988-11-21
JPH0579177B2 JPH0579177B2 (enExample) 1993-11-01

Family

ID=14698493

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62116903A Granted JPS63283149A (ja) 1987-05-15 1987-05-15 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS63283149A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7112468B2 (en) 1998-09-25 2006-09-26 Stmicroelectronics, Inc. Stacked multi-component integrated circuit microprocessor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7112468B2 (en) 1998-09-25 2006-09-26 Stmicroelectronics, Inc. Stacked multi-component integrated circuit microprocessor

Also Published As

Publication number Publication date
JPH0579177B2 (enExample) 1993-11-01

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