JPH0573250B2 - - Google Patents

Info

Publication number
JPH0573250B2
JPH0573250B2 JP61265339A JP26533986A JPH0573250B2 JP H0573250 B2 JPH0573250 B2 JP H0573250B2 JP 61265339 A JP61265339 A JP 61265339A JP 26533986 A JP26533986 A JP 26533986A JP H0573250 B2 JPH0573250 B2 JP H0573250B2
Authority
JP
Japan
Prior art keywords
discharge power
power supply
side electrode
electrode
amorphous silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61265339A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63119520A (ja
Inventor
Akihisa Matsuda
Tomonori Yamaoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Sheet Glass Co Ltd
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Nippon Sheet Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology, Nippon Sheet Glass Co Ltd filed Critical Agency of Industrial Science and Technology
Priority to JP26533986A priority Critical patent/JPS63119520A/ja
Publication of JPS63119520A publication Critical patent/JPS63119520A/ja
Publication of JPH0573250B2 publication Critical patent/JPH0573250B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Photovoltaic Devices (AREA)
JP26533986A 1986-11-07 1986-11-07 非晶質シリコン合金堆積法及び装置 Granted JPS63119520A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26533986A JPS63119520A (ja) 1986-11-07 1986-11-07 非晶質シリコン合金堆積法及び装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26533986A JPS63119520A (ja) 1986-11-07 1986-11-07 非晶質シリコン合金堆積法及び装置

Publications (2)

Publication Number Publication Date
JPS63119520A JPS63119520A (ja) 1988-05-24
JPH0573250B2 true JPH0573250B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-10-14

Family

ID=17415812

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26533986A Granted JPS63119520A (ja) 1986-11-07 1986-11-07 非晶質シリコン合金堆積法及び装置

Country Status (1)

Country Link
JP (1) JPS63119520A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2874175B2 (ja) * 1989-03-08 1999-03-24 セイコーエプソン株式会社 半導体装置の製造方法
JPH0341848U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1989-08-31 1991-04-22

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58104015A (ja) * 1981-12-11 1983-06-21 Canon Inc 堆積膜の製造装置
JPS61119030A (ja) * 1984-11-14 1986-06-06 Nippon Soken Inc 水素化アモルフアス半導体薄膜の製造方法

Also Published As

Publication number Publication date
JPS63119520A (ja) 1988-05-24

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term