JPH0411626B2 - - Google Patents

Info

Publication number
JPH0411626B2
JPH0411626B2 JP58004269A JP426983A JPH0411626B2 JP H0411626 B2 JPH0411626 B2 JP H0411626B2 JP 58004269 A JP58004269 A JP 58004269A JP 426983 A JP426983 A JP 426983A JP H0411626 B2 JPH0411626 B2 JP H0411626B2
Authority
JP
Japan
Prior art keywords
gas
reaction vessel
film
radicals
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58004269A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59131511A (ja
Inventor
Zenko Hirose
Takeshi Ueno
Katsumi Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP58004269A priority Critical patent/JPS59131511A/ja
Publication of JPS59131511A publication Critical patent/JPS59131511A/ja
Publication of JPH0411626B2 publication Critical patent/JPH0411626B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Photovoltaic Devices (AREA)
  • Photoreceptors In Electrophotography (AREA)
JP58004269A 1983-01-17 1983-01-17 アモルフアスシリコン膜の成膜方法 Granted JPS59131511A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58004269A JPS59131511A (ja) 1983-01-17 1983-01-17 アモルフアスシリコン膜の成膜方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58004269A JPS59131511A (ja) 1983-01-17 1983-01-17 アモルフアスシリコン膜の成膜方法

Publications (2)

Publication Number Publication Date
JPS59131511A JPS59131511A (ja) 1984-07-28
JPH0411626B2 true JPH0411626B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-03-02

Family

ID=11579817

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58004269A Granted JPS59131511A (ja) 1983-01-17 1983-01-17 アモルフアスシリコン膜の成膜方法

Country Status (1)

Country Link
JP (1) JPS59131511A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH081895B2 (ja) * 1985-06-07 1996-01-10 松下電器産業株式会社 非晶質シリコン膜の形成方法
JP2790843B2 (ja) * 1989-04-19 1998-08-27 シャープ株式会社 薄膜気相成長装置
JP2000212749A (ja) * 1999-01-22 2000-08-02 Ulvac Japan Ltd 薄膜形成装置、及び窒化タングステン薄膜製造方法
US6402848B1 (en) * 1999-04-23 2002-06-11 Tokyo Electron Limited Single-substrate-treating apparatus for semiconductor processing system

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56102577A (en) * 1980-01-18 1981-08-17 Mitsubishi Electric Corp Method and device for forming thin film

Also Published As

Publication number Publication date
JPS59131511A (ja) 1984-07-28

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