JPH057044B2 - - Google Patents

Info

Publication number
JPH057044B2
JPH057044B2 JP60138750A JP13875085A JPH057044B2 JP H057044 B2 JPH057044 B2 JP H057044B2 JP 60138750 A JP60138750 A JP 60138750A JP 13875085 A JP13875085 A JP 13875085A JP H057044 B2 JPH057044 B2 JP H057044B2
Authority
JP
Japan
Prior art keywords
gas
removal
agent
silicon
gaseous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP60138750A
Other languages
English (en)
Japanese (ja)
Other versions
JPS621439A (ja
Inventor
Koichi Kitahara
Takashi Shimada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Pionics Ltd
Original Assignee
Japan Pionics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Pionics Ltd filed Critical Japan Pionics Ltd
Priority to JP60138750A priority Critical patent/JPS621439A/ja
Publication of JPS621439A publication Critical patent/JPS621439A/ja
Publication of JPH057044B2 publication Critical patent/JPH057044B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Treating Waste Gases (AREA)
JP60138750A 1985-06-25 1985-06-25 有害成分の除去方法 Granted JPS621439A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60138750A JPS621439A (ja) 1985-06-25 1985-06-25 有害成分の除去方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60138750A JPS621439A (ja) 1985-06-25 1985-06-25 有害成分の除去方法

Publications (2)

Publication Number Publication Date
JPS621439A JPS621439A (ja) 1987-01-07
JPH057044B2 true JPH057044B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-01-28

Family

ID=15229306

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60138750A Granted JPS621439A (ja) 1985-06-25 1985-06-25 有害成分の除去方法

Country Status (1)

Country Link
JP (1) JPS621439A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63200820A (ja) * 1987-02-17 1988-08-19 Kikuchi:Kk 半導体製造中の排ガス処理方法
JP2615897B2 (ja) * 1988-08-26 1997-06-04 富士通株式会社 減圧化学気相成長装置
JP4675148B2 (ja) * 2005-05-12 2011-04-20 昭和電工株式会社 フッ素化合物含有ガスの処理方法及び処理装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60125233A (ja) * 1983-12-08 1985-07-04 Mitsui Toatsu Chem Inc 排ガスの高度処理方法

Also Published As

Publication number Publication date
JPS621439A (ja) 1987-01-07

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees