JPH0566733B2 - - Google Patents

Info

Publication number
JPH0566733B2
JPH0566733B2 JP59202890A JP20289084A JPH0566733B2 JP H0566733 B2 JPH0566733 B2 JP H0566733B2 JP 59202890 A JP59202890 A JP 59202890A JP 20289084 A JP20289084 A JP 20289084A JP H0566733 B2 JPH0566733 B2 JP H0566733B2
Authority
JP
Japan
Prior art keywords
cassette
doors
canopy
door
box
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59202890A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60227437A (ja
Inventor
Jei Toorisu Baakurei
Paritsuku Maihaa
Roorensu Surashaa Deebitsudo
Ii Jonsuton Maaku
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HP Inc
Original Assignee
Hewlett Packard Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Co filed Critical Hewlett Packard Co
Publication of JPS60227437A publication Critical patent/JPS60227437A/ja
Publication of JPH0566733B2 publication Critical patent/JPH0566733B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H10P72/3408—Docking arrangements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/139—Associated with semiconductor wafer handling including wafer charging or discharging means for vacuum chamber
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/14—Wafer cassette transporting
JP59202890A 1983-09-28 1984-09-27 集積回路用インターフェース装置 Granted JPS60227437A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/536,600 US4532970A (en) 1983-09-28 1983-09-28 Particle-free dockable interface for integrated circuit processing
US536600 1983-09-28

Publications (2)

Publication Number Publication Date
JPS60227437A JPS60227437A (ja) 1985-11-12
JPH0566733B2 true JPH0566733B2 (https=) 1993-09-22

Family

ID=24139181

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59202890A Granted JPS60227437A (ja) 1983-09-28 1984-09-27 集積回路用インターフェース装置

Country Status (2)

Country Link
US (1) US4532970A (https=)
JP (1) JPS60227437A (https=)

Families Citing this family (115)

* Cited by examiner, † Cited by third party
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Also Published As

Publication number Publication date
US4532970A (en) 1985-08-06
JPS60227437A (ja) 1985-11-12

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