JPH0562310B2 - - Google Patents

Info

Publication number
JPH0562310B2
JPH0562310B2 JP84281909A JP28190984A JPH0562310B2 JP H0562310 B2 JPH0562310 B2 JP H0562310B2 JP 84281909 A JP84281909 A JP 84281909A JP 28190984 A JP28190984 A JP 28190984A JP H0562310 B2 JPH0562310 B2 JP H0562310B2
Authority
JP
Japan
Prior art keywords
probe
data
probes
integrated circuit
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP84281909A
Other languages
English (en)
Japanese (ja)
Other versions
JPS617479A (ja
Inventor
Aaru Riido Rii
Aaru Ratsutorifu Chaaruzu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Publication of JPS617479A publication Critical patent/JPS617479A/ja
Publication of JPH0562310B2 publication Critical patent/JPH0562310B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
JP59281909A 1978-01-30 1984-12-26 集積回路の検査方法 Granted JPS617479A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US87356478A 1978-01-30 1978-01-30
US873564 1978-01-30
US893118 1986-08-01

Publications (2)

Publication Number Publication Date
JPS617479A JPS617479A (ja) 1986-01-14
JPH0562310B2 true JPH0562310B2 (OSRAM) 1993-09-08

Family

ID=25361883

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59281909A Granted JPS617479A (ja) 1978-01-30 1984-12-26 集積回路の検査方法

Country Status (1)

Country Link
JP (1) JPS617479A (OSRAM)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63244854A (ja) * 1987-03-31 1988-10-12 Tokyo Electron Ltd プロ−ブ装置
JP3520396B2 (ja) 1997-07-02 2004-04-19 セイコーエプソン株式会社 アクティブマトリクス基板と表示装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5178692A (OSRAM) * 1974-12-29 1976-07-08 Sony Corp

Also Published As

Publication number Publication date
JPS617479A (ja) 1986-01-14

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