JPH0560252B2 - - Google Patents
Info
- Publication number
- JPH0560252B2 JPH0560252B2 JP59230355A JP23035584A JPH0560252B2 JP H0560252 B2 JPH0560252 B2 JP H0560252B2 JP 59230355 A JP59230355 A JP 59230355A JP 23035584 A JP23035584 A JP 23035584A JP H0560252 B2 JPH0560252 B2 JP H0560252B2
- Authority
- JP
- Japan
- Prior art keywords
- alignment
- manual
- mask
- wafer
- manual processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H10P95/00—
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59230355A JPS61110428A (ja) | 1984-11-02 | 1984-11-02 | 半導体焼付装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59230355A JPS61110428A (ja) | 1984-11-02 | 1984-11-02 | 半導体焼付装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61110428A JPS61110428A (ja) | 1986-05-28 |
| JPH0560252B2 true JPH0560252B2 (index.php) | 1993-09-01 |
Family
ID=16906558
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59230355A Granted JPS61110428A (ja) | 1984-11-02 | 1984-11-02 | 半導体焼付装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61110428A (index.php) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR910008036B1 (ko) * | 1987-11-04 | 1991-10-07 | 구보다 뎃꼬오 가부시끼가이샤 | 트랙터 추진축의 전동구조 |
| JP3013359B2 (ja) * | 1989-04-12 | 2000-02-28 | キヤノン株式会社 | 半導体露光装置 |
| JPH05172191A (ja) * | 1991-12-19 | 1993-07-09 | Mitsubishi Motors Corp | スライディングギア |
| CN109870885A (zh) * | 2017-12-05 | 2019-06-11 | 山东华光光电子股份有限公司 | 一种手动光刻机的预对准方法及预对准装置 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59101830A (ja) * | 1982-12-01 | 1984-06-12 | Canon Inc | 転写装置 |
-
1984
- 1984-11-02 JP JP59230355A patent/JPS61110428A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61110428A (ja) | 1986-05-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |