JPH0554269B2 - - Google Patents

Info

Publication number
JPH0554269B2
JPH0554269B2 JP59055293A JP5529384A JPH0554269B2 JP H0554269 B2 JPH0554269 B2 JP H0554269B2 JP 59055293 A JP59055293 A JP 59055293A JP 5529384 A JP5529384 A JP 5529384A JP H0554269 B2 JPH0554269 B2 JP H0554269B2
Authority
JP
Japan
Prior art keywords
shot
film
semiconductor device
forming
tungsten
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59055293A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60200575A (ja
Inventor
Hajime Matsura
Hiroshi Nakamura
Toshio Nonaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP59055293A priority Critical patent/JPS60200575A/ja
Publication of JPS60200575A publication Critical patent/JPS60200575A/ja
Publication of JPH0554269B2 publication Critical patent/JPH0554269B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/80—FETs having rectifying junction gate electrodes

Landscapes

  • Junction Field-Effect Transistors (AREA)
  • Electrodes Of Semiconductors (AREA)
JP59055293A 1984-03-24 1984-03-24 シヨツトキ半導体装置及びその製造方法 Granted JPS60200575A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59055293A JPS60200575A (ja) 1984-03-24 1984-03-24 シヨツトキ半導体装置及びその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59055293A JPS60200575A (ja) 1984-03-24 1984-03-24 シヨツトキ半導体装置及びその製造方法

Publications (2)

Publication Number Publication Date
JPS60200575A JPS60200575A (ja) 1985-10-11
JPH0554269B2 true JPH0554269B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-08-12

Family

ID=12994527

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59055293A Granted JPS60200575A (ja) 1984-03-24 1984-03-24 シヨツトキ半導体装置及びその製造方法

Country Status (1)

Country Link
JP (1) JPS60200575A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1939832A1 (fr) 2006-12-26 2008-07-02 Somfy SAS Capteur-émetteur de sécurité pour la détection de vent dans une installation domotique

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2661235B2 (ja) * 1989-02-06 1997-10-08 富士通株式会社 半導体装置の製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55128875A (en) * 1979-03-27 1980-10-06 Nec Corp Semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1939832A1 (fr) 2006-12-26 2008-07-02 Somfy SAS Capteur-émetteur de sécurité pour la détection de vent dans une installation domotique

Also Published As

Publication number Publication date
JPS60200575A (ja) 1985-10-11

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term