JPH0553870B2 - - Google Patents

Info

Publication number
JPH0553870B2
JPH0553870B2 JP60243660A JP24366085A JPH0553870B2 JP H0553870 B2 JPH0553870 B2 JP H0553870B2 JP 60243660 A JP60243660 A JP 60243660A JP 24366085 A JP24366085 A JP 24366085A JP H0553870 B2 JPH0553870 B2 JP H0553870B2
Authority
JP
Japan
Prior art keywords
lid
vacuum chamber
dry etching
oxide film
main body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60243660A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62103377A (ja
Inventor
Yutaka Kato
Eizo Isoyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Altemira Co Ltd
Original Assignee
Showa Aluminum Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Aluminum Corp filed Critical Showa Aluminum Corp
Priority to JP24366085A priority Critical patent/JPS62103377A/ja
Publication of JPS62103377A publication Critical patent/JPS62103377A/ja
Publication of JPH0553870B2 publication Critical patent/JPH0553870B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
JP24366085A 1985-10-29 1985-10-29 Ｃｖｄ装置およびドライ・エツチング装置における真空チヤンバの製造方法 Granted JPS62103377A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24366085A JPS62103377A (ja) 1985-10-29 1985-10-29 Ｃｖｄ装置およびドライ・エツチング装置における真空チヤンバの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24366085A JPS62103377A (ja) 1985-10-29 1985-10-29 Ｃｖｄ装置およびドライ・エツチング装置における真空チヤンバの製造方法

Publications (2)

Publication Number Publication Date
JPS62103377A JPS62103377A (ja) 1987-05-13
JPH0553870B2 true JPH0553870B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-08-11

Family

ID=17107108

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24366085A Granted JPS62103377A (ja) 1985-10-29 1985-10-29 Ｃｖｄ装置およびドライ・エツチング装置における真空チヤンバの製造方法

Country Status (1)

Country Link
JP (1) JPS62103377A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000192293A (ja) * 1998-12-24 2000-07-11 Aisin Seiki Co Ltd アルマイト皮膜
DE112006002987T5 (de) 2005-11-17 2008-10-02 Kabushiki Kaisha Kobe Seiko Sho Aluminiumlegierungselement mit hervorragender Korrosionsbeständigkeit

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003034894A (ja) 2001-07-25 2003-02-07 Kobe Steel Ltd 耐腐食性に優れたＡｌ合金部材
JP4716779B2 (ja) * 2005-05-18 2011-07-06 株式会社アルバック アルミニウム又はアルミニウム合金の耐食処理方法
JP5019391B2 (ja) 2005-06-17 2012-09-05 国立大学法人東北大学 金属酸化物膜、積層体、金属部材並びにその製造方法
JP5382677B2 (ja) 2005-06-17 2014-01-08 国立大学法人東北大学 金属部材の保護膜構造及び保護膜構造を用いた金属部品並びに保護膜構造を用いた半導体又は平板ディスプレイ製造装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5936525B2 (ja) * 1980-09-13 1984-09-04 幸男 石川 高速蒸気熱湯沸器
JPS6021382A (ja) * 1983-07-15 1985-02-02 Canon Inc プラズマｃｖｄ装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000192293A (ja) * 1998-12-24 2000-07-11 Aisin Seiki Co Ltd アルマイト皮膜
DE112006002987T5 (de) 2005-11-17 2008-10-02 Kabushiki Kaisha Kobe Seiko Sho Aluminiumlegierungselement mit hervorragender Korrosionsbeständigkeit

Also Published As

Publication number Publication date
JPS62103377A (ja) 1987-05-13

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