JPH0547392B2 - - Google Patents

Info

Publication number
JPH0547392B2
JPH0547392B2 JP1042856A JP4285689A JPH0547392B2 JP H0547392 B2 JPH0547392 B2 JP H0547392B2 JP 1042856 A JP1042856 A JP 1042856A JP 4285689 A JP4285689 A JP 4285689A JP H0547392 B2 JPH0547392 B2 JP H0547392B2
Authority
JP
Japan
Prior art keywords
layer
foam layer
polishing
wafer
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1042856A
Other languages
English (en)
Japanese (ja)
Other versions
JPH02220838A (ja
Inventor
Terunao Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RODEELE NITTA KK
Original Assignee
RODEELE NITTA KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RODEELE NITTA KK filed Critical RODEELE NITTA KK
Priority to JP4285689A priority Critical patent/JPH02220838A/ja
Publication of JPH02220838A publication Critical patent/JPH02220838A/ja
Publication of JPH0547392B2 publication Critical patent/JPH0547392B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Polishing Bodies And Polishing Tools (AREA)
  • Laminated Bodies (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
JP4285689A 1989-02-22 1989-02-22 積層体、並びに該積層体を用いた被研磨部材の保持材及び研磨布 Granted JPH02220838A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4285689A JPH02220838A (ja) 1989-02-22 1989-02-22 積層体、並びに該積層体を用いた被研磨部材の保持材及び研磨布

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4285689A JPH02220838A (ja) 1989-02-22 1989-02-22 積層体、並びに該積層体を用いた被研磨部材の保持材及び研磨布

Publications (2)

Publication Number Publication Date
JPH02220838A JPH02220838A (ja) 1990-09-04
JPH0547392B2 true JPH0547392B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-07-16

Family

ID=12647665

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4285689A Granted JPH02220838A (ja) 1989-02-22 1989-02-22 積層体、並びに該積層体を用いた被研磨部材の保持材及び研磨布

Country Status (1)

Country Link
JP (1) JPH02220838A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4501175B2 (ja) * 1999-06-09 2010-07-14 東レ株式会社 研磨パッドの製造方法
WO2002043921A1 (fr) * 2000-12-01 2002-06-06 Toyo Boseki Kabushiki Kaisha Tampon de polissage, procede de fabrication de ce tampon de polissage, et couche d'amortissement pour ce tampon de polissage
JP2009061524A (ja) * 2007-09-05 2009-03-26 Fujibo Holdings Inc 保持パッド
JP2011148082A (ja) * 2009-12-25 2011-08-04 Filwel:Kk 研磨布
WO2011118010A1 (ja) * 2010-03-25 2011-09-29 旭硝子株式会社 ガラス基板の保持用膜体、及びガラス基板の研磨方法
CN102844152B (zh) * 2010-03-30 2015-09-09 旭硝子株式会社 玻璃基板保持用膜体及玻璃基板的研磨方法
JP5851124B2 (ja) * 2011-06-13 2016-02-03 スリーエム イノベイティブ プロパティズ カンパニー 研磨用構造体
JP5844189B2 (ja) 2012-03-26 2016-01-13 富士紡ホールディングス株式会社 研磨パッド及び研磨パッドの製造方法
JP5968023B2 (ja) * 2012-04-11 2016-08-10 スリーエム イノベイティブ プロパティズ カンパニー 研磨シート、研磨材ロール及び研磨工具
JP6178190B2 (ja) * 2012-09-28 2017-08-09 富士紡ホールディングス株式会社 研磨パッド
WO2014051104A1 (ja) * 2012-09-28 2014-04-03 富士紡ホールディングス株式会社 研磨パッド
JP6178191B2 (ja) * 2012-09-28 2017-08-09 富士紡ホールディングス株式会社 研磨パッド
CN103085402B (zh) * 2013-02-04 2015-07-08 苏春 高仿真皮毛一体面料及其制备方法
EP2899226B1 (en) * 2013-03-19 2017-05-10 LG Chem, Ltd. Method for preparing polyurethane support pad

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5034083A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1973-07-27 1975-04-02
JPS5198301A (ja) * 1975-02-25 1976-08-30 Goseihikakukoseibutsu

Also Published As

Publication number Publication date
JPH02220838A (ja) 1990-09-04

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