JPH054664B2 - - Google Patents

Info

Publication number
JPH054664B2
JPH054664B2 JP62144430A JP14443087A JPH054664B2 JP H054664 B2 JPH054664 B2 JP H054664B2 JP 62144430 A JP62144430 A JP 62144430A JP 14443087 A JP14443087 A JP 14443087A JP H054664 B2 JPH054664 B2 JP H054664B2
Authority
JP
Japan
Prior art keywords
pmma
radiation
molecular weight
sensitive material
sensitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62144430A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0197950A (ja
Inventor
Yukinori Kuwano
Yoshikazu Tsujino
Juji Hamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP62144430A priority Critical patent/JPH0197950A/ja
Priority to KR1019870009433A priority patent/KR910001290B1/ko
Priority to US07/090,992 priority patent/US4855214A/en
Priority to CH3330/87A priority patent/CH673462A5/de
Publication of JPH0197950A publication Critical patent/JPH0197950A/ja
Publication of JPH054664B2 publication Critical patent/JPH054664B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/143—Electron beam

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Materials For Photolithography (AREA)
  • Coating Of Shaped Articles Made Of Macromolecular Substances (AREA)
JP62144430A 1986-09-01 1987-06-09 高分子放射線感応材料 Granted JPH0197950A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP62144430A JPH0197950A (ja) 1986-09-01 1987-06-09 高分子放射線感応材料
KR1019870009433A KR910001290B1 (ko) 1986-09-01 1987-08-28 고분자 방사선 감응재료
US07/090,992 US4855214A (en) 1986-09-01 1987-08-31 Radiation-sensitive high-polymeric material
CH3330/87A CH673462A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-09-01 1987-08-31

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP61-205283 1986-09-01
JP20528386 1986-09-01
JP62144430A JPH0197950A (ja) 1986-09-01 1987-06-09 高分子放射線感応材料

Publications (2)

Publication Number Publication Date
JPH0197950A JPH0197950A (ja) 1989-04-17
JPH054664B2 true JPH054664B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-01-20

Family

ID=26475841

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62144430A Granted JPH0197950A (ja) 1986-09-01 1987-06-09 高分子放射線感応材料

Country Status (4)

Country Link
US (1) US4855214A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPH0197950A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
KR (1) KR910001290B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH (1) CH673462A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10160662A1 (de) * 2001-12-11 2003-06-18 Baerlocher Gmbh Stabilisatorzusammensetzung, deren Herstellung und Verwendung

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51147324A (en) * 1975-06-13 1976-12-17 Fujitsu Ltd Solvent for electronic wire resist
JPS54118776A (en) * 1978-03-08 1979-09-14 Fujitsu Ltd Pattern forming method
JPS57162430A (en) * 1981-03-31 1982-10-06 Sanyo Electric Co Ltd Process for positive type fine pattern formation
JPS57163233A (en) * 1981-03-31 1982-10-07 Sanyo Electric Co Ltd Radiation sensitive positive type polymer
JPS5882241A (ja) * 1981-11-11 1983-05-17 Sanyo Electric Co Ltd ポジ型放射線感応材料

Also Published As

Publication number Publication date
US4855214A (en) 1989-08-08
JPH0197950A (ja) 1989-04-17
CH673462A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-03-15
KR910001290B1 (ko) 1991-02-28
KR880004544A (ko) 1988-06-07

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