JPH0544171B2 - - Google Patents
Info
- Publication number
- JPH0544171B2 JPH0544171B2 JP57105519A JP10551982A JPH0544171B2 JP H0544171 B2 JPH0544171 B2 JP H0544171B2 JP 57105519 A JP57105519 A JP 57105519A JP 10551982 A JP10551982 A JP 10551982A JP H0544171 B2 JPH0544171 B2 JP H0544171B2
- Authority
- JP
- Japan
- Prior art keywords
- scaling value
- stage
- input
- pattern
- start position
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/302—Controlling tubes by external information, e.g. programme control
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10551982A JPS58223324A (ja) | 1982-06-21 | 1982-06-21 | 描画装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10551982A JPS58223324A (ja) | 1982-06-21 | 1982-06-21 | 描画装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58223324A JPS58223324A (ja) | 1983-12-24 |
| JPH0544171B2 true JPH0544171B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-07-05 |
Family
ID=14409843
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10551982A Granted JPS58223324A (ja) | 1982-06-21 | 1982-06-21 | 描画装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58223324A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0282513A (ja) * | 1988-09-19 | 1990-03-23 | Jeol Ltd | 荷電粒子ビーム描画方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57107035A (en) * | 1980-12-25 | 1982-07-03 | Toshiba Mach Co Ltd | Drawing system by electron ray |
-
1982
- 1982-06-21 JP JP10551982A patent/JPS58223324A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58223324A (ja) | 1983-12-24 |
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