JPH0543184B2 - - Google Patents

Info

Publication number
JPH0543184B2
JPH0543184B2 JP24626385A JP24626385A JPH0543184B2 JP H0543184 B2 JPH0543184 B2 JP H0543184B2 JP 24626385 A JP24626385 A JP 24626385A JP 24626385 A JP24626385 A JP 24626385A JP H0543184 B2 JPH0543184 B2 JP H0543184B2
Authority
JP
Japan
Prior art keywords
wafer ring
wafer
cassette
ring
storage section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP24626385A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62106642A (ja
Inventor
Hisaya Suzuki
Makoto Arie
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Mechatronics Co Ltd
Original Assignee
Toshiba Seiki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Seiki Co Ltd filed Critical Toshiba Seiki Co Ltd
Priority to JP24626385A priority Critical patent/JPS62106642A/ja
Publication of JPS62106642A publication Critical patent/JPS62106642A/ja
Publication of JPH0543184B2 publication Critical patent/JPH0543184B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Die Bonding (AREA)
  • Special Conveying (AREA)
  • De-Stacking Of Articles (AREA)
JP24626385A 1985-11-05 1985-11-05 ウェハリングの供給・返送方法 Granted JPS62106642A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24626385A JPS62106642A (ja) 1985-11-05 1985-11-05 ウェハリングの供給・返送方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24626385A JPS62106642A (ja) 1985-11-05 1985-11-05 ウェハリングの供給・返送方法

Publications (2)

Publication Number Publication Date
JPS62106642A JPS62106642A (ja) 1987-05-18
JPH0543184B2 true JPH0543184B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-06-30

Family

ID=17145917

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24626385A Granted JPS62106642A (ja) 1985-11-05 1985-11-05 ウェハリングの供給・返送方法

Country Status (1)

Country Link
JP (1) JPS62106642A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5387067A (en) * 1993-01-14 1995-02-07 Applied Materials, Inc. Direct load/unload semiconductor wafer cassette apparatus and transfer system
JP3198401B2 (ja) * 1995-08-18 2001-08-13 株式会社新川 ウェーハリングの供給・返送装置
JPH0964148A (ja) * 1995-08-18 1997-03-07 Shinkawa Ltd ウェーハリングの供給・返送装置
JP3180208B2 (ja) * 1995-09-18 2001-06-25 株式会社新川 ペレットピックアップ装置
JPH10107128A (ja) * 1996-10-01 1998-04-24 Shinkawa Ltd ウェーハリングの供給装置
KR102490593B1 (ko) * 2016-08-22 2023-01-20 세메스 주식회사 웨이퍼링 이송 장치

Also Published As

Publication number Publication date
JPS62106642A (ja) 1987-05-18

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Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees