JPH0354467B2 - - Google Patents

Info

Publication number
JPH0354467B2
JPH0354467B2 JP11909083A JP11909083A JPH0354467B2 JP H0354467 B2 JPH0354467 B2 JP H0354467B2 JP 11909083 A JP11909083 A JP 11909083A JP 11909083 A JP11909083 A JP 11909083A JP H0354467 B2 JPH0354467 B2 JP H0354467B2
Authority
JP
Japan
Prior art keywords
tray
chip
magazine
chips
trays
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11909083A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6010747A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11909083A priority Critical patent/JPS6010747A/ja
Publication of JPS6010747A publication Critical patent/JPS6010747A/ja
Publication of JPH0354467B2 publication Critical patent/JPH0354467B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Die Bonding (AREA)
JP11909083A 1983-06-30 1983-06-30 自動チツプ付装置 Granted JPS6010747A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11909083A JPS6010747A (ja) 1983-06-30 1983-06-30 自動チツプ付装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11909083A JPS6010747A (ja) 1983-06-30 1983-06-30 自動チツプ付装置

Publications (2)

Publication Number Publication Date
JPS6010747A JPS6010747A (ja) 1985-01-19
JPH0354467B2 true JPH0354467B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-08-20

Family

ID=14752642

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11909083A Granted JPS6010747A (ja) 1983-06-30 1983-06-30 自動チツプ付装置

Country Status (1)

Country Link
JP (1) JPS6010747A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6305500B1 (en) * 1999-08-25 2001-10-23 Maxtor Corporation Material delivery system for clean room-like environments
KR100365543B1 (ko) * 2000-08-30 2002-12-26 동양반도체장비 주식회사 반도체패키지 제조 장비의 엘리베이터 장치
JP2010208647A (ja) * 2009-03-09 2010-09-24 Honda Motor Co Ltd 物品収納トレー及び物品収納トレーの搬送方法

Also Published As

Publication number Publication date
JPS6010747A (ja) 1985-01-19

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