JPH0539624Y2 - - Google Patents

Info

Publication number
JPH0539624Y2
JPH0539624Y2 JP1985004125U JP412585U JPH0539624Y2 JP H0539624 Y2 JPH0539624 Y2 JP H0539624Y2 JP 1985004125 U JP1985004125 U JP 1985004125U JP 412585 U JP412585 U JP 412585U JP H0539624 Y2 JPH0539624 Y2 JP H0539624Y2
Authority
JP
Japan
Prior art keywords
quartz tube
gas
boat
tube
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1985004125U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61121734U (en, 2012
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985004125U priority Critical patent/JPH0539624Y2/ja
Publication of JPS61121734U publication Critical patent/JPS61121734U/ja
Application granted granted Critical
Publication of JPH0539624Y2 publication Critical patent/JPH0539624Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP1985004125U 1985-01-18 1985-01-18 Expired - Lifetime JPH0539624Y2 (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985004125U JPH0539624Y2 (en, 2012) 1985-01-18 1985-01-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985004125U JPH0539624Y2 (en, 2012) 1985-01-18 1985-01-18

Publications (2)

Publication Number Publication Date
JPS61121734U JPS61121734U (en, 2012) 1986-07-31
JPH0539624Y2 true JPH0539624Y2 (en, 2012) 1993-10-07

Family

ID=30479395

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985004125U Expired - Lifetime JPH0539624Y2 (en, 2012) 1985-01-18 1985-01-18

Country Status (1)

Country Link
JP (1) JPH0539624Y2 (en, 2012)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2635019B2 (ja) * 1995-08-11 1997-07-30 株式会社フレンドテック研究所 半導体デバイスの製造装置
JP2919801B2 (ja) * 1997-02-06 1999-07-19 株式会社日立製作所 膜の形成方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49387A (en, 2012) * 1972-04-17 1974-01-05
JPS4915366A (en, 2012) * 1972-05-17 1974-02-09
JPS535869B2 (en, 2012) * 1973-05-28 1978-03-02
JPS5843225Y2 (ja) * 1975-03-31 1983-09-30 富士通株式会社 キソウセイチヨウソウチ
JPS52149969A (en) * 1976-06-09 1977-12-13 Hitachi Ltd Method of putting wafers into and out from reaction tube in heat-treatment furnace
JPS5691417A (en) * 1979-12-26 1981-07-24 Fujitsu Ltd Heating treatment device for wafer
JPS57159015A (en) * 1981-03-26 1982-10-01 Nec Corp Film growing device
JPS5821025A (ja) * 1981-07-31 1983-02-07 Ogura Clutch Co Ltd 逆作動連結装置
JPS58118119A (ja) * 1982-01-07 1983-07-14 Nec Corp 反応性イオンプレ−テイング装置
JPS58138334U (ja) * 1982-03-12 1983-09-17 富士通株式会社 ウエハ自動給材機構
JPS5938377A (ja) * 1982-08-26 1984-03-02 Canon Inc プラズマｃｖｄ装置
JPS60193323A (ja) * 1984-03-15 1985-10-01 Nec Corp 半導体気相成長装置
JPH0758696B2 (ja) * 1984-11-09 1995-06-21 株式会社日立製作所 半導体ウエハ加熱装置
JPS6250970A (ja) * 1985-08-28 1987-03-05 林　器良 多相カ−ド読み取り方法及びその装置

Also Published As

Publication number Publication date
JPS61121734U (en, 2012) 1986-07-31

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