JPS535869B2 - - Google Patents
Info
- Publication number
- JPS535869B2 JPS535869B2 JP5998773A JP5998773A JPS535869B2 JP S535869 B2 JPS535869 B2 JP S535869B2 JP 5998773 A JP5998773 A JP 5998773A JP 5998773 A JP5998773 A JP 5998773A JP S535869 B2 JPS535869 B2 JP S535869B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5998773A JPS535869B2 (en, 2012) | 1973-05-28 | 1973-05-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5998773A JPS535869B2 (en, 2012) | 1973-05-28 | 1973-05-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS508782A JPS508782A (en, 2012) | 1975-01-29 |
| JPS535869B2 true JPS535869B2 (en, 2012) | 1978-03-02 |
Family
ID=13129015
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5998773A Expired JPS535869B2 (en, 2012) | 1973-05-28 | 1973-05-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS535869B2 (en, 2012) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51140888A (en) * | 1975-05-30 | 1976-12-04 | Hitachi Ltd | A vapor phase growth apparatus |
| JPH0539624Y2 (en, 2012) * | 1985-01-18 | 1993-10-07 | ||
| JPH0693439B2 (ja) * | 1987-03-20 | 1994-11-16 | 株式会社日立製作所 | 半導体ウエハの熱処理装置 |
-
1973
- 1973-05-28 JP JP5998773A patent/JPS535869B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS508782A (en, 2012) | 1975-01-29 |