JPS52149969A - Method of putting wafers into and out from reaction tube in heat-treatment furnace - Google Patents

Method of putting wafers into and out from reaction tube in heat-treatment furnace

Info

Publication number
JPS52149969A
JPS52149969A JP6655576A JP6655576A JPS52149969A JP S52149969 A JPS52149969 A JP S52149969A JP 6655576 A JP6655576 A JP 6655576A JP 6655576 A JP6655576 A JP 6655576A JP S52149969 A JPS52149969 A JP S52149969A
Authority
JP
Japan
Prior art keywords
reaction tube
heat
treatment furnace
wafers
putting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6655576A
Other languages
Japanese (ja)
Inventor
Noboru Tateishi
Keizo Inaba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6655576A priority Critical patent/JPS52149969A/en
Publication of JPS52149969A publication Critical patent/JPS52149969A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To prevent contamination of wafers and jig by fully accommodating a wafer jig into a wafer protecting tube in putting wafers into and out from a reaction tube.
COPYRIGHT: (C)1977,JPO&Japio
JP6655576A 1976-06-09 1976-06-09 Method of putting wafers into and out from reaction tube in heat-treatment furnace Pending JPS52149969A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6655576A JPS52149969A (en) 1976-06-09 1976-06-09 Method of putting wafers into and out from reaction tube in heat-treatment furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6655576A JPS52149969A (en) 1976-06-09 1976-06-09 Method of putting wafers into and out from reaction tube in heat-treatment furnace

Publications (1)

Publication Number Publication Date
JPS52149969A true JPS52149969A (en) 1977-12-13

Family

ID=13319268

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6655576A Pending JPS52149969A (en) 1976-06-09 1976-06-09 Method of putting wafers into and out from reaction tube in heat-treatment furnace

Country Status (1)

Country Link
JP (1) JPS52149969A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61121734U (en) * 1985-01-18 1986-07-31

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61121734U (en) * 1985-01-18 1986-07-31
JPH0539624Y2 (en) * 1985-01-18 1993-10-07

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