JPS52149969A - Method of putting wafers into and out from reaction tube in heat-treatment furnace - Google Patents
Method of putting wafers into and out from reaction tube in heat-treatment furnaceInfo
- Publication number
- JPS52149969A JPS52149969A JP6655576A JP6655576A JPS52149969A JP S52149969 A JPS52149969 A JP S52149969A JP 6655576 A JP6655576 A JP 6655576A JP 6655576 A JP6655576 A JP 6655576A JP S52149969 A JPS52149969 A JP S52149969A
- Authority
- JP
- Japan
- Prior art keywords
- reaction tube
- heat
- treatment furnace
- wafers
- putting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To prevent contamination of wafers and jig by fully accommodating a wafer jig into a wafer protecting tube in putting wafers into and out from a reaction tube.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6655576A JPS52149969A (en) | 1976-06-09 | 1976-06-09 | Method of putting wafers into and out from reaction tube in heat-treatment furnace |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6655576A JPS52149969A (en) | 1976-06-09 | 1976-06-09 | Method of putting wafers into and out from reaction tube in heat-treatment furnace |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52149969A true JPS52149969A (en) | 1977-12-13 |
Family
ID=13319268
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6655576A Pending JPS52149969A (en) | 1976-06-09 | 1976-06-09 | Method of putting wafers into and out from reaction tube in heat-treatment furnace |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52149969A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61121734U (en) * | 1985-01-18 | 1986-07-31 |
-
1976
- 1976-06-09 JP JP6655576A patent/JPS52149969A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61121734U (en) * | 1985-01-18 | 1986-07-31 | ||
JPH0539624Y2 (en) * | 1985-01-18 | 1993-10-07 |
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