JPH0530022Y2 - - Google Patents

Info

Publication number
JPH0530022Y2
JPH0530022Y2 JP1948986U JP1948986U JPH0530022Y2 JP H0530022 Y2 JPH0530022 Y2 JP H0530022Y2 JP 1948986 U JP1948986 U JP 1948986U JP 1948986 U JP1948986 U JP 1948986U JP H0530022 Y2 JPH0530022 Y2 JP H0530022Y2
Authority
JP
Japan
Prior art keywords
wafer
guide
transport path
chuck
tapered wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1948986U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62133551U (enEXAMPLES
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1948986U priority Critical patent/JPH0530022Y2/ja
Publication of JPS62133551U publication Critical patent/JPS62133551U/ja
Application granted granted Critical
Publication of JPH0530022Y2 publication Critical patent/JPH0530022Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Registering Or Overturning Sheets (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
  • Feeding Of Articles To Conveyors (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
JP1948986U 1986-02-15 1986-02-15 Expired - Lifetime JPH0530022Y2 (enEXAMPLES)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1948986U JPH0530022Y2 (enEXAMPLES) 1986-02-15 1986-02-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1948986U JPH0530022Y2 (enEXAMPLES) 1986-02-15 1986-02-15

Publications (2)

Publication Number Publication Date
JPS62133551U JPS62133551U (enEXAMPLES) 1987-08-22
JPH0530022Y2 true JPH0530022Y2 (enEXAMPLES) 1993-07-30

Family

ID=30814129

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1948986U Expired - Lifetime JPH0530022Y2 (enEXAMPLES) 1986-02-15 1986-02-15

Country Status (1)

Country Link
JP (1) JPH0530022Y2 (enEXAMPLES)

Also Published As

Publication number Publication date
JPS62133551U (enEXAMPLES) 1987-08-22

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