JPH0514904B2 - - Google Patents

Info

Publication number
JPH0514904B2
JPH0514904B2 JP59147006A JP14700684A JPH0514904B2 JP H0514904 B2 JPH0514904 B2 JP H0514904B2 JP 59147006 A JP59147006 A JP 59147006A JP 14700684 A JP14700684 A JP 14700684A JP H0514904 B2 JPH0514904 B2 JP H0514904B2
Authority
JP
Japan
Prior art keywords
vacuum chamber
gas
drum substrate
layer
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59147006A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6126051A (ja
Inventor
Fumyuki Suda
Ko Yasui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Stanley Electric Co Ltd
Original Assignee
Stanley Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Stanley Electric Co Ltd filed Critical Stanley Electric Co Ltd
Priority to JP14700684A priority Critical patent/JPS6126051A/ja
Publication of JPS6126051A publication Critical patent/JPS6126051A/ja
Publication of JPH0514904B2 publication Critical patent/JPH0514904B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
    • G03G5/02—Charge-receiving layers
    • G03G5/04—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
    • G03G5/08—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Chemical Vapour Deposition (AREA)
JP14700684A 1984-07-17 1984-07-17 アモルフアスシリコン電子写真用感光体の製造方法 Granted JPS6126051A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14700684A JPS6126051A (ja) 1984-07-17 1984-07-17 アモルフアスシリコン電子写真用感光体の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14700684A JPS6126051A (ja) 1984-07-17 1984-07-17 アモルフアスシリコン電子写真用感光体の製造方法

Publications (2)

Publication Number Publication Date
JPS6126051A JPS6126051A (ja) 1986-02-05
JPH0514904B2 true JPH0514904B2 (cs) 1993-02-26

Family

ID=15420426

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14700684A Granted JPS6126051A (ja) 1984-07-17 1984-07-17 アモルフアスシリコン電子写真用感光体の製造方法

Country Status (1)

Country Link
JP (1) JPS6126051A (cs)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07100865B2 (ja) * 1986-03-13 1995-11-01 富士通株式会社 減圧ｃｖｄ処理装置のクリーニング法
JPH0291658A (ja) * 1988-09-29 1990-03-30 Fuji Xerox Co Ltd 電子写真用感光体の製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59136739A (ja) * 1983-01-25 1984-08-06 Fuji Electric Corp Res & Dev Ltd 非晶質シリコン電子写真感光体の再生方法

Also Published As

Publication number Publication date
JPS6126051A (ja) 1986-02-05

Similar Documents

Publication Publication Date Title
US6071797A (en) Method for forming amorphous carbon thin film by plasma chemical vapor deposition
JP2646941B2 (ja) 薄膜形成方法
KR100256197B1 (ko) 플라즈마 가공 방법 및 플라즈마 가공 장치
JPH06287760A (ja) プラズマ処理装置及び処理方法
JP2582553B2 (ja) プラズマｃｖｄ法による機能性堆積膜形成装置
US20040222188A1 (en) Method of cleaning a deposition chamber and apparatus for depositing a metal on a substrate
JPH0514904B2 (cs)
US5945353A (en) Plasma processing method
JPH0124866B2 (cs)
US5098812A (en) Photosensitive device and manufacturing method for the same
JPS62200361A (ja) 電子写真感光体の製造方法
JP2956947B2 (ja) 電子写真用感光体
JP2867150B2 (ja) マイクロ波プラズマｃｖｄ装置
JP3402952B2 (ja) 堆積膜形成方法及び堆積膜形成装置
JP3964570B2 (ja) 電子写真感光体の製造方法及びそれに基づく電子写真感光体
JPH0426764A (ja) 堆積膜形成装置
JPH0897161A (ja) 高周波プラズマｃｖｄ法による堆積膜形成方法及び堆積膜形成装置
JP2925298B2 (ja) 堆積膜形成方法
JPS5987462A (ja) 非晶質感光ドラムの製造方法
JP2008214659A (ja) 堆積膜の形成方法
JPH04281460A (ja) アモルファスシリコン感光体の作製方法
JPS63166979A (ja) ガスエツチング方法
JPH02129372A (ja) 堆積膜形成装置の洗浄方法
JPS6230881A (ja) マイクロ波プラズマｃｖｄ法による堆積膜形成装置
JPS60116783A (ja) 堆積膜製造装置