JPH0513393B2 - - Google Patents

Info

Publication number
JPH0513393B2
JPH0513393B2 JP60155259A JP15525985A JPH0513393B2 JP H0513393 B2 JPH0513393 B2 JP H0513393B2 JP 60155259 A JP60155259 A JP 60155259A JP 15525985 A JP15525985 A JP 15525985A JP H0513393 B2 JPH0513393 B2 JP H0513393B2
Authority
JP
Japan
Prior art keywords
film
layer
window
thickness
lower electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60155259A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6216585A (ja
Inventor
Takeshi Imamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP60155259A priority Critical patent/JPS6216585A/ja
Publication of JPS6216585A publication Critical patent/JPS6216585A/ja
Publication of JPH0513393B2 publication Critical patent/JPH0513393B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
JP60155259A 1985-07-16 1985-07-16 超伝導デバイス Granted JPS6216585A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60155259A JPS6216585A (ja) 1985-07-16 1985-07-16 超伝導デバイス

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60155259A JPS6216585A (ja) 1985-07-16 1985-07-16 超伝導デバイス

Publications (2)

Publication Number Publication Date
JPS6216585A JPS6216585A (ja) 1987-01-24
JPH0513393B2 true JPH0513393B2 (enrdf_load_stackoverflow) 1993-02-22

Family

ID=15602004

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60155259A Granted JPS6216585A (ja) 1985-07-16 1985-07-16 超伝導デバイス

Country Status (1)

Country Link
JP (1) JPS6216585A (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59138255U (ja) * 1983-03-07 1984-09-14 株式会社日立製作所 ジヨセフソン接合装置

Also Published As

Publication number Publication date
JPS6216585A (ja) 1987-01-24

Similar Documents

Publication Publication Date Title
JPS6161280B2 (enrdf_load_stackoverflow)
JPS6146081A (ja) ジヨセフソン接合素子の製造方法
JPH0513393B2 (enrdf_load_stackoverflow)
JP2682136B2 (ja) ジョセフソン素子の製造方法
JP2646440B2 (ja) ジョセフソン接合素子の製造方法
JPS60208873A (ja) ジヨセフソン接合素子の製造方法
JPH0634417B2 (ja) ジヨセフソン接合素子の製造方法
JPS61208879A (ja) ジヨセフソン集積回路の製造方法
JP2899308B2 (ja) 超電導素子の製造方法
JPS61229377A (ja) ジヨセフソン集積回路の製造方法
JPS61144892A (ja) シヨセフソン集積回路の製造方法
JPS62118539A (ja) 多層配線の形成方法
JPH0511432B2 (enrdf_load_stackoverflow)
JPS61244078A (ja) 超伝導線路の作製方法
JPS60208872A (ja) 超電導コンタクトの製造方法
JPH0260230B2 (enrdf_load_stackoverflow)
JPH0149025B2 (enrdf_load_stackoverflow)
JPS6224677A (ja) 超伝導回路用接地面の形成方法
JPS6396973A (ja) ジヨセフソン接合素子の製造方法
JPS6060786A (ja) 超伝導回路装置の製造方法
JPH058596B2 (enrdf_load_stackoverflow)
JPS6143488A (ja) 超伝導コンタクトの製造方法
JPH0376792B2 (enrdf_load_stackoverflow)
JPH0519993B2 (enrdf_load_stackoverflow)
JPS6257274B2 (enrdf_load_stackoverflow)

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term