JPS6216585A - 超伝導デバイス - Google Patents
超伝導デバイスInfo
- Publication number
- JPS6216585A JPS6216585A JP60155259A JP15525985A JPS6216585A JP S6216585 A JPS6216585 A JP S6216585A JP 60155259 A JP60155259 A JP 60155259A JP 15525985 A JP15525985 A JP 15525985A JP S6216585 A JPS6216585 A JP S6216585A
- Authority
- JP
- Japan
- Prior art keywords
- film
- lower electrode
- window
- thickness
- contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002887 superconductor Substances 0.000 claims description 8
- 239000012212 insulator Substances 0.000 claims description 2
- 230000007704 transition Effects 0.000 abstract description 6
- 239000000758 substrate Substances 0.000 abstract description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 6
- 229910052681 coesite Inorganic materials 0.000 abstract 3
- 229910052906 cristobalite Inorganic materials 0.000 abstract 3
- 239000000377 silicon dioxide Substances 0.000 abstract 3
- 235000012239 silicon dioxide Nutrition 0.000 abstract 3
- 229910052682 stishovite Inorganic materials 0.000 abstract 3
- 229910052905 tridymite Inorganic materials 0.000 abstract 3
- 239000012141 concentrate Substances 0.000 abstract 1
- 230000008719 thickening Effects 0.000 abstract 1
- 239000010955 niobium Substances 0.000 description 11
- 238000001020 plasma etching Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000059 patterning Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 101001015052 Zea mays Trypsin/factor XIIA inhibitor Proteins 0.000 description 1
- 235000014121 butter Nutrition 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60155259A JPS6216585A (ja) | 1985-07-16 | 1985-07-16 | 超伝導デバイス |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60155259A JPS6216585A (ja) | 1985-07-16 | 1985-07-16 | 超伝導デバイス |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6216585A true JPS6216585A (ja) | 1987-01-24 |
| JPH0513393B2 JPH0513393B2 (enrdf_load_stackoverflow) | 1993-02-22 |
Family
ID=15602004
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60155259A Granted JPS6216585A (ja) | 1985-07-16 | 1985-07-16 | 超伝導デバイス |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6216585A (enrdf_load_stackoverflow) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59138255U (ja) * | 1983-03-07 | 1984-09-14 | 株式会社日立製作所 | ジヨセフソン接合装置 |
-
1985
- 1985-07-16 JP JP60155259A patent/JPS6216585A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59138255U (ja) * | 1983-03-07 | 1984-09-14 | 株式会社日立製作所 | ジヨセフソン接合装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0513393B2 (enrdf_load_stackoverflow) | 1993-02-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |