JPH0513008Y2 - - Google Patents

Info

Publication number
JPH0513008Y2
JPH0513008Y2 JP1985123286U JP12328685U JPH0513008Y2 JP H0513008 Y2 JPH0513008 Y2 JP H0513008Y2 JP 1985123286 U JP1985123286 U JP 1985123286U JP 12328685 U JP12328685 U JP 12328685U JP H0513008 Y2 JPH0513008 Y2 JP H0513008Y2
Authority
JP
Japan
Prior art keywords
rotary table
drying chamber
air intake
wafer
centrifugal dryer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1985123286U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6232530U (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985123286U priority Critical patent/JPH0513008Y2/ja
Publication of JPS6232530U publication Critical patent/JPS6232530U/ja
Application granted granted Critical
Publication of JPH0513008Y2 publication Critical patent/JPH0513008Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
JP1985123286U 1985-08-09 1985-08-09 Expired - Lifetime JPH0513008Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985123286U JPH0513008Y2 (cs) 1985-08-09 1985-08-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985123286U JPH0513008Y2 (cs) 1985-08-09 1985-08-09

Publications (2)

Publication Number Publication Date
JPS6232530U JPS6232530U (cs) 1987-02-26
JPH0513008Y2 true JPH0513008Y2 (cs) 1993-04-06

Family

ID=31014249

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985123286U Expired - Lifetime JPH0513008Y2 (cs) 1985-08-09 1985-08-09

Country Status (1)

Country Link
JP (1) JPH0513008Y2 (cs)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS548455A (en) * 1977-06-22 1979-01-22 Hitachi Ltd Cleansing/drying device for products
JPS5936930A (ja) * 1982-08-25 1984-02-29 Toshiba Corp ウエ−ハ乾燥装置

Also Published As

Publication number Publication date
JPS6232530U (cs) 1987-02-26

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