JPH0455546B2 - - Google Patents

Info

Publication number
JPH0455546B2
JPH0455546B2 JP62037799A JP3779987A JPH0455546B2 JP H0455546 B2 JPH0455546 B2 JP H0455546B2 JP 62037799 A JP62037799 A JP 62037799A JP 3779987 A JP3779987 A JP 3779987A JP H0455546 B2 JPH0455546 B2 JP H0455546B2
Authority
JP
Japan
Prior art keywords
etching
insulating film
coating film
junction
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP62037799A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63205973A (ja
Inventor
Mutsuo Hidaka
Shuichi Nagasawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP62037799A priority Critical patent/JPS63205973A/ja
Publication of JPS63205973A publication Critical patent/JPS63205973A/ja
Publication of JPH0455546B2 publication Critical patent/JPH0455546B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
JP62037799A 1987-02-23 1987-02-23 ジヨセフソン接合の形成方法 Granted JPS63205973A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62037799A JPS63205973A (ja) 1987-02-23 1987-02-23 ジヨセフソン接合の形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62037799A JPS63205973A (ja) 1987-02-23 1987-02-23 ジヨセフソン接合の形成方法

Publications (2)

Publication Number Publication Date
JPS63205973A JPS63205973A (ja) 1988-08-25
JPH0455546B2 true JPH0455546B2 (cs) 1992-09-03

Family

ID=12507551

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62037799A Granted JPS63205973A (ja) 1987-02-23 1987-02-23 ジヨセフソン接合の形成方法

Country Status (1)

Country Link
JP (1) JPS63205973A (cs)

Also Published As

Publication number Publication date
JPS63205973A (ja) 1988-08-25

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term