JPH0453098B2 - - Google Patents
Info
- Publication number
- JPH0453098B2 JPH0453098B2 JP17734785A JP17734785A JPH0453098B2 JP H0453098 B2 JPH0453098 B2 JP H0453098B2 JP 17734785 A JP17734785 A JP 17734785A JP 17734785 A JP17734785 A JP 17734785A JP H0453098 B2 JPH0453098 B2 JP H0453098B2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- substrate storage
- storage box
- long groove
- feeding mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 19
- 239000000758 substrate Substances 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 7
- 239000011295 pitch Substances 0.000 claims description 5
- 239000000969 carrier Substances 0.000 description 9
- 230000032258 transport Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Landscapes
- Reciprocating Conveyors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17734785A JPS6237941A (ja) | 1985-08-12 | 1985-08-12 | 半導体基板収納箱の搬送方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17734785A JPS6237941A (ja) | 1985-08-12 | 1985-08-12 | 半導体基板収納箱の搬送方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6237941A JPS6237941A (ja) | 1987-02-18 |
JPH0453098B2 true JPH0453098B2 (fr) | 1992-08-25 |
Family
ID=16029378
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17734785A Granted JPS6237941A (ja) | 1985-08-12 | 1985-08-12 | 半導体基板収納箱の搬送方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6237941A (fr) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU2007269203B2 (en) | 2006-06-30 | 2014-03-06 | Smith & Nephew, Inc. | Anatomical motion hinged prosthesis |
JP7376349B2 (ja) * | 2019-12-26 | 2023-11-08 | 株式会社安川電機 | ワーク処理システム |
-
1985
- 1985-08-12 JP JP17734785A patent/JPS6237941A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6237941A (ja) | 1987-02-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |