JPH0441507B2 - - Google Patents

Info

Publication number
JPH0441507B2
JPH0441507B2 JP62125604A JP12560487A JPH0441507B2 JP H0441507 B2 JPH0441507 B2 JP H0441507B2 JP 62125604 A JP62125604 A JP 62125604A JP 12560487 A JP12560487 A JP 12560487A JP H0441507 B2 JPH0441507 B2 JP H0441507B2
Authority
JP
Japan
Prior art keywords
groove
oxide film
capacitor
electrode
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62125604A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6323352A (ja
Inventor
Hiroshi Iwai
Yoshio Nishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP62125604A priority Critical patent/JPS6323352A/ja
Publication of JPS6323352A publication Critical patent/JPS6323352A/ja
Publication of JPH0441507B2 publication Critical patent/JPH0441507B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/01—Manufacture or treatment
    • H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
    • H10B12/03—Making the capacitor or connections thereto
    • H10B12/038—Making the capacitor or connections thereto the capacitor being in a trench in the substrate

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Semiconductor Memories (AREA)
JP62125604A 1987-05-22 1987-05-22 半導体装置 Granted JPS6323352A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62125604A JPS6323352A (ja) 1987-05-22 1987-05-22 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62125604A JPS6323352A (ja) 1987-05-22 1987-05-22 半導体装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP15897879A Division JPS5681968A (en) 1979-12-07 1979-12-07 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS6323352A JPS6323352A (ja) 1988-01-30
JPH0441507B2 true JPH0441507B2 (https=) 1992-07-08

Family

ID=14914236

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62125604A Granted JPS6323352A (ja) 1987-05-22 1987-05-22 半導体装置

Country Status (1)

Country Link
JP (1) JPS6323352A (https=)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5376686A (en) * 1976-12-17 1978-07-07 Nec Corp Semiconductor device
JPS5394191A (en) * 1977-01-28 1978-08-17 Toshiba Corp Semiconductor device

Also Published As

Publication number Publication date
JPS6323352A (ja) 1988-01-30

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