JPH0423858Y2 - - Google Patents

Info

Publication number
JPH0423858Y2
JPH0423858Y2 JP1986021158U JP2115886U JPH0423858Y2 JP H0423858 Y2 JPH0423858 Y2 JP H0423858Y2 JP 1986021158 U JP1986021158 U JP 1986021158U JP 2115886 U JP2115886 U JP 2115886U JP H0423858 Y2 JPH0423858 Y2 JP H0423858Y2
Authority
JP
Japan
Prior art keywords
wafer
cassette
conveyor belt
motors
conveyor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986021158U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62133546U (enEXAMPLES
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986021158U priority Critical patent/JPH0423858Y2/ja
Publication of JPS62133546U publication Critical patent/JPS62133546U/ja
Application granted granted Critical
Publication of JPH0423858Y2 publication Critical patent/JPH0423858Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Pile Receivers (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP1986021158U 1986-02-17 1986-02-17 Expired JPH0423858Y2 (enEXAMPLES)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986021158U JPH0423858Y2 (enEXAMPLES) 1986-02-17 1986-02-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986021158U JPH0423858Y2 (enEXAMPLES) 1986-02-17 1986-02-17

Publications (2)

Publication Number Publication Date
JPS62133546U JPS62133546U (enEXAMPLES) 1987-08-22
JPH0423858Y2 true JPH0423858Y2 (enEXAMPLES) 1992-06-04

Family

ID=30817344

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986021158U Expired JPH0423858Y2 (enEXAMPLES) 1986-02-17 1986-02-17

Country Status (1)

Country Link
JP (1) JPH0423858Y2 (enEXAMPLES)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52156552A (en) * 1976-06-23 1977-12-27 Hitachi Ltd Wafer inspection apparatus
JPS5986143A (ja) * 1982-11-09 1984-05-18 Ulvac Corp ウエハ自動交換装置

Also Published As

Publication number Publication date
JPS62133546U (enEXAMPLES) 1987-08-22

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