JPH0416019B2 - - Google Patents

Info

Publication number
JPH0416019B2
JPH0416019B2 JP60085852A JP8585285A JPH0416019B2 JP H0416019 B2 JPH0416019 B2 JP H0416019B2 JP 60085852 A JP60085852 A JP 60085852A JP 8585285 A JP8585285 A JP 8585285A JP H0416019 B2 JPH0416019 B2 JP H0416019B2
Authority
JP
Japan
Prior art keywords
polycrystalline silicon
groove
silicon
silicon substrate
oxide film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP60085852A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61244043A (ja
Inventor
Takashi Hosaka
Kunihiro Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP60085852A priority Critical patent/JPS61244043A/ja
Publication of JPS61244043A publication Critical patent/JPS61244043A/ja
Publication of JPH0416019B2 publication Critical patent/JPH0416019B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W10/00—
    • H10W10/01—

Landscapes

  • Element Separation (AREA)
JP60085852A 1985-04-22 1985-04-22 半導体装置の製造方法 Granted JPS61244043A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60085852A JPS61244043A (ja) 1985-04-22 1985-04-22 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60085852A JPS61244043A (ja) 1985-04-22 1985-04-22 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS61244043A JPS61244043A (ja) 1986-10-30
JPH0416019B2 true JPH0416019B2 (index.php) 1992-03-19

Family

ID=13870400

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60085852A Granted JPS61244043A (ja) 1985-04-22 1985-04-22 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS61244043A (index.php)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2556128B2 (ja) * 1989-02-28 1996-11-20 三菱電機株式会社 半導体装置の製造方法
JP2006324644A (ja) * 2005-04-18 2006-11-30 Nec Electronics Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS61244043A (ja) 1986-10-30

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