JPH0378777B2 - - Google Patents

Info

Publication number
JPH0378777B2
JPH0378777B2 JP62219627A JP21962787A JPH0378777B2 JP H0378777 B2 JPH0378777 B2 JP H0378777B2 JP 62219627 A JP62219627 A JP 62219627A JP 21962787 A JP21962787 A JP 21962787A JP H0378777 B2 JPH0378777 B2 JP H0378777B2
Authority
JP
Japan
Prior art keywords
substrate
edge
tubes
solvent
coating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP62219627A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6461917A (en
Inventor
Katsuya Okumura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP62219627A priority Critical patent/JPS6461917A/ja
Publication of JPS6461917A publication Critical patent/JPS6461917A/ja
Publication of JPH0378777B2 publication Critical patent/JPH0378777B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Coating Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP62219627A 1987-09-02 1987-09-02 Device for removing coating film of end section of substrate Granted JPS6461917A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62219627A JPS6461917A (en) 1987-09-02 1987-09-02 Device for removing coating film of end section of substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62219627A JPS6461917A (en) 1987-09-02 1987-09-02 Device for removing coating film of end section of substrate

Publications (2)

Publication Number Publication Date
JPS6461917A JPS6461917A (en) 1989-03-08
JPH0378777B2 true JPH0378777B2 (enExample) 1991-12-16

Family

ID=16738494

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62219627A Granted JPS6461917A (en) 1987-09-02 1987-09-02 Device for removing coating film of end section of substrate

Country Status (1)

Country Link
JP (1) JPS6461917A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2659306B2 (ja) * 1991-12-24 1997-09-30 大日本スクリーン製造株式会社 基板端縁洗浄装置
JP3373047B2 (ja) * 1994-04-26 2003-02-04 大日本スクリーン製造株式会社 基板端縁洗浄装置および基板端縁洗浄方法
US6827814B2 (en) 2000-05-08 2004-12-07 Tokyo Electron Limited Processing apparatus, processing system and processing method
US6805769B2 (en) 2000-10-13 2004-10-19 Dainippon Screen Mfg. Co., Ltd. Substrate processing apparatus

Also Published As

Publication number Publication date
JPS6461917A (en) 1989-03-08

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