JPS6461917A - Device for removing coating film of end section of substrate - Google Patents
Device for removing coating film of end section of substrateInfo
- Publication number
- JPS6461917A JPS6461917A JP21962787A JP21962787A JPS6461917A JP S6461917 A JPS6461917 A JP S6461917A JP 21962787 A JP21962787 A JP 21962787A JP 21962787 A JP21962787 A JP 21962787A JP S6461917 A JPS6461917 A JP S6461917A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- solvent
- tube
- end section
- clearance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Photosensitive Polymer And Photoresist Processing (AREA)
- Coating Apparatus (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
PURPOSE:To prevent the generation of the scattering of a solvent and the rebound of a melt, and to remove a coating film on an end section effectively even in substrates except a circular one by mounting a third tube for discharging the solvent and the melt. CONSTITUTION:First and second tubes 21 and 22 are arranged, forming a clearance 23 so that end sections are opposed vertically, and a third tube 24 is connected while being crossed at right angles with the first and second tubes 21, 22 so as to close one part of the clearance 23. The peripheral section of a substrate 27 coated with a resist 26 is inserted into the clearance 23 so as to be oppositely faced from the axial direction of the third tube 24, and the substrate 27 is turned at low speed of 10-20rpm. A solvent 28 is fed from the tubes 21, 22, the resist 26 at the end section of the substrate 27 is melted, and the solvent and a melt are discharged from the third tube 24.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21962787A JPS6461917A (en) | 1987-09-02 | 1987-09-02 | Device for removing coating film of end section of substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21962787A JPS6461917A (en) | 1987-09-02 | 1987-09-02 | Device for removing coating film of end section of substrate |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6461917A true JPS6461917A (en) | 1989-03-08 |
JPH0378777B2 JPH0378777B2 (en) | 1991-12-16 |
Family
ID=16738494
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP21962787A Granted JPS6461917A (en) | 1987-09-02 | 1987-09-02 | Device for removing coating film of end section of substrate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6461917A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05175117A (en) * | 1991-12-24 | 1993-07-13 | Dainippon Screen Mfg Co Ltd | Cleaner for edge of substrate |
JPH07297120A (en) * | 1994-04-26 | 1995-11-10 | Dainippon Screen Mfg Co Ltd | Equipment for cleaning fringe of substrate |
US6805769B2 (en) | 2000-10-13 | 2004-10-19 | Dainippon Screen Mfg. Co., Ltd. | Substrate processing apparatus |
US6827814B2 (en) | 2000-05-08 | 2004-12-07 | Tokyo Electron Limited | Processing apparatus, processing system and processing method |
-
1987
- 1987-09-02 JP JP21962787A patent/JPS6461917A/en active Granted
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05175117A (en) * | 1991-12-24 | 1993-07-13 | Dainippon Screen Mfg Co Ltd | Cleaner for edge of substrate |
JPH07297120A (en) * | 1994-04-26 | 1995-11-10 | Dainippon Screen Mfg Co Ltd | Equipment for cleaning fringe of substrate |
US6827814B2 (en) | 2000-05-08 | 2004-12-07 | Tokyo Electron Limited | Processing apparatus, processing system and processing method |
US6805769B2 (en) | 2000-10-13 | 2004-10-19 | Dainippon Screen Mfg. Co., Ltd. | Substrate processing apparatus |
Also Published As
Publication number | Publication date |
---|---|
JPH0378777B2 (en) | 1991-12-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS53115754A (en) | Double-side coating method | |
JPS6461917A (en) | Device for removing coating film of end section of substrate | |
JPS53142395A (en) | Granulated slag producing apparatus | |
JPS51147967A (en) | Method of controlling spot exposure | |
JPS555755A (en) | Spray coating method | |
JPS5227439A (en) | Process for coating an adhesive on the inner walls of synthetic resin tube | |
JPS5357239A (en) | Pressure-sensitive tackifier composition | |
JPS5364249A (en) | Method of coating | |
JPS5367706A (en) | Method of cleaning and cleaning agent | |
JPS54147556A (en) | Boiling heat-conducting wall | |
JPS5339327A (en) | Powder coating composition | |
JPS5521835A (en) | Method and device of coating internal surface of cathode ray tube | |
JPS535962A (en) | Electron microscope | |
JPS5419579A (en) | Method of treating surface of fluorescent material | |
JPS5382611A (en) | Preventing device for air intrusion industrial furnace | |
JPS5241465A (en) | Arm nozzle for a tableware cleaning apparatus | |
JPS5253947A (en) | Method for coting circumference of bottle | |
JPS5347179A (en) | Method of coating lamp bubls with liquid | |
JPS6458998A (en) | Flow divider | |
JPS5547334A (en) | Consumable electrode melting for electro-slag | |
JPS57209658A (en) | Nozzle device in powder coating apparatus for tubular bulb | |
EP0105606A3 (en) | High throughput, high uniformity field emission devices | |
JPS5421861A (en) | Production of liquid crystal elements | |
JPS57209659A (en) | Nozzle device in powder coating apparatus for fluorescent lamp | |
JPS5264177A (en) | Apparatus for fabricating fluorescent lamp |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term | ||
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20071216 Year of fee payment: 16 |