JPS6461917A - Device for removing coating film of end section of substrate - Google Patents

Device for removing coating film of end section of substrate

Info

Publication number
JPS6461917A
JPS6461917A JP21962787A JP21962787A JPS6461917A JP S6461917 A JPS6461917 A JP S6461917A JP 21962787 A JP21962787 A JP 21962787A JP 21962787 A JP21962787 A JP 21962787A JP S6461917 A JPS6461917 A JP S6461917A
Authority
JP
Japan
Prior art keywords
substrate
solvent
tube
end section
clearance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21962787A
Other languages
Japanese (ja)
Other versions
JPH0378777B2 (en
Inventor
Katsuya Okumura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP21962787A priority Critical patent/JPS6461917A/en
Publication of JPS6461917A publication Critical patent/JPS6461917A/en
Publication of JPH0378777B2 publication Critical patent/JPH0378777B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Coating Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE:To prevent the generation of the scattering of a solvent and the rebound of a melt, and to remove a coating film on an end section effectively even in substrates except a circular one by mounting a third tube for discharging the solvent and the melt. CONSTITUTION:First and second tubes 21 and 22 are arranged, forming a clearance 23 so that end sections are opposed vertically, and a third tube 24 is connected while being crossed at right angles with the first and second tubes 21, 22 so as to close one part of the clearance 23. The peripheral section of a substrate 27 coated with a resist 26 is inserted into the clearance 23 so as to be oppositely faced from the axial direction of the third tube 24, and the substrate 27 is turned at low speed of 10-20rpm. A solvent 28 is fed from the tubes 21, 22, the resist 26 at the end section of the substrate 27 is melted, and the solvent and a melt are discharged from the third tube 24.
JP21962787A 1987-09-02 1987-09-02 Device for removing coating film of end section of substrate Granted JPS6461917A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21962787A JPS6461917A (en) 1987-09-02 1987-09-02 Device for removing coating film of end section of substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21962787A JPS6461917A (en) 1987-09-02 1987-09-02 Device for removing coating film of end section of substrate

Publications (2)

Publication Number Publication Date
JPS6461917A true JPS6461917A (en) 1989-03-08
JPH0378777B2 JPH0378777B2 (en) 1991-12-16

Family

ID=16738494

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21962787A Granted JPS6461917A (en) 1987-09-02 1987-09-02 Device for removing coating film of end section of substrate

Country Status (1)

Country Link
JP (1) JPS6461917A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05175117A (en) * 1991-12-24 1993-07-13 Dainippon Screen Mfg Co Ltd Cleaner for edge of substrate
JPH07297120A (en) * 1994-04-26 1995-11-10 Dainippon Screen Mfg Co Ltd Equipment for cleaning fringe of substrate
US6805769B2 (en) 2000-10-13 2004-10-19 Dainippon Screen Mfg. Co., Ltd. Substrate processing apparatus
US6827814B2 (en) 2000-05-08 2004-12-07 Tokyo Electron Limited Processing apparatus, processing system and processing method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05175117A (en) * 1991-12-24 1993-07-13 Dainippon Screen Mfg Co Ltd Cleaner for edge of substrate
JPH07297120A (en) * 1994-04-26 1995-11-10 Dainippon Screen Mfg Co Ltd Equipment for cleaning fringe of substrate
US6827814B2 (en) 2000-05-08 2004-12-07 Tokyo Electron Limited Processing apparatus, processing system and processing method
US6805769B2 (en) 2000-10-13 2004-10-19 Dainippon Screen Mfg. Co., Ltd. Substrate processing apparatus

Also Published As

Publication number Publication date
JPH0378777B2 (en) 1991-12-16

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