JPH0373446U - - Google Patents
Info
- Publication number
- JPH0373446U JPH0373446U JP13499789U JP13499789U JPH0373446U JP H0373446 U JPH0373446 U JP H0373446U JP 13499789 U JP13499789 U JP 13499789U JP 13499789 U JP13499789 U JP 13499789U JP H0373446 U JPH0373446 U JP H0373446U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- test head
- contact
- board
- peephole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007689 inspection Methods 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000010586 diagram Methods 0.000 description 4
- 238000009434 installation Methods 0.000 description 3
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989134997U JPH0729636Y2 (ja) | 1989-11-21 | 1989-11-21 | 半導体ウェハー検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989134997U JPH0729636Y2 (ja) | 1989-11-21 | 1989-11-21 | 半導体ウェハー検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0373446U true JPH0373446U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-07-24 |
| JPH0729636Y2 JPH0729636Y2 (ja) | 1995-07-05 |
Family
ID=31682290
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989134997U Expired - Lifetime JPH0729636Y2 (ja) | 1989-11-21 | 1989-11-21 | 半導体ウェハー検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0729636Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3560907A (en) * | 1968-05-17 | 1971-02-02 | Peter V N Heller | Test connector for microminiature circuits |
| JPS57103062A (en) * | 1980-12-19 | 1982-06-26 | Fujitsu Ltd | Probe test device |
| JPS6143854A (ja) * | 1984-08-08 | 1986-03-03 | Hitachi Ltd | 搬送波再生回路 |
| JPS6178135A (ja) * | 1984-09-25 | 1986-04-21 | Mitsubishi Electric Corp | 半導体ウエ−ハの測定装置 |
-
1989
- 1989-11-21 JP JP1989134997U patent/JPH0729636Y2/ja not_active Expired - Lifetime
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3560907A (en) * | 1968-05-17 | 1971-02-02 | Peter V N Heller | Test connector for microminiature circuits |
| JPS57103062A (en) * | 1980-12-19 | 1982-06-26 | Fujitsu Ltd | Probe test device |
| JPS6143854A (ja) * | 1984-08-08 | 1986-03-03 | Hitachi Ltd | 搬送波再生回路 |
| JPS6178135A (ja) * | 1984-09-25 | 1986-04-21 | Mitsubishi Electric Corp | 半導体ウエ−ハの測定装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0729636Y2 (ja) | 1995-07-05 |