JPH0729636Y2 - 半導体ウェハー検査装置 - Google Patents

半導体ウェハー検査装置

Info

Publication number
JPH0729636Y2
JPH0729636Y2 JP1989134997U JP13499789U JPH0729636Y2 JP H0729636 Y2 JPH0729636 Y2 JP H0729636Y2 JP 1989134997 U JP1989134997 U JP 1989134997U JP 13499789 U JP13499789 U JP 13499789U JP H0729636 Y2 JPH0729636 Y2 JP H0729636Y2
Authority
JP
Japan
Prior art keywords
test head
semiconductor wafer
performance board
contact
wafer inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989134997U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0373446U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
秀樹 川崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP1989134997U priority Critical patent/JPH0729636Y2/ja
Publication of JPH0373446U publication Critical patent/JPH0373446U/ja
Application granted granted Critical
Publication of JPH0729636Y2 publication Critical patent/JPH0729636Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
JP1989134997U 1989-11-21 1989-11-21 半導体ウェハー検査装置 Expired - Lifetime JPH0729636Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989134997U JPH0729636Y2 (ja) 1989-11-21 1989-11-21 半導体ウェハー検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989134997U JPH0729636Y2 (ja) 1989-11-21 1989-11-21 半導体ウェハー検査装置

Publications (2)

Publication Number Publication Date
JPH0373446U JPH0373446U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-07-24
JPH0729636Y2 true JPH0729636Y2 (ja) 1995-07-05

Family

ID=31682290

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989134997U Expired - Lifetime JPH0729636Y2 (ja) 1989-11-21 1989-11-21 半導体ウェハー検査装置

Country Status (1)

Country Link
JP (1) JPH0729636Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3560907A (en) * 1968-05-17 1971-02-02 Peter V N Heller Test connector for microminiature circuits
JPS57103062A (en) * 1980-12-19 1982-06-26 Fujitsu Ltd Probe test device
JPS6143854A (ja) * 1984-08-08 1986-03-03 Hitachi Ltd 搬送波再生回路
JPS6178135A (ja) * 1984-09-25 1986-04-21 Mitsubishi Electric Corp 半導体ウエ−ハの測定装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3560907A (en) * 1968-05-17 1971-02-02 Peter V N Heller Test connector for microminiature circuits
JPS57103062A (en) * 1980-12-19 1982-06-26 Fujitsu Ltd Probe test device
JPS6143854A (ja) * 1984-08-08 1986-03-03 Hitachi Ltd 搬送波再生回路
JPS6178135A (ja) * 1984-09-25 1986-04-21 Mitsubishi Electric Corp 半導体ウエ−ハの測定装置

Also Published As

Publication number Publication date
JPH0373446U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-07-24

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