JPH0362309B2 - - Google Patents
Info
- Publication number
- JPH0362309B2 JPH0362309B2 JP60256814A JP25681485A JPH0362309B2 JP H0362309 B2 JPH0362309 B2 JP H0362309B2 JP 60256814 A JP60256814 A JP 60256814A JP 25681485 A JP25681485 A JP 25681485A JP H0362309 B2 JPH0362309 B2 JP H0362309B2
- Authority
- JP
- Japan
- Prior art keywords
- region
- annular
- layer
- semiconductor device
- resistive layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 67
- 229910052751 metal Inorganic materials 0.000 claims description 15
- 239000002184 metal Substances 0.000 claims description 15
- 230000015556 catabolic process Effects 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 9
- 230000000087 stabilizing effect Effects 0.000 claims description 7
- 239000000758 substrate Substances 0.000 description 7
- 238000009826 distribution Methods 0.000 description 6
- 230000005684 electric field Effects 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000005669 field effect Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 238000005094 computer simulation Methods 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 230000005686 electrostatic field Effects 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000012938 design process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000407 epitaxy Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 230000002028 premature Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D64/00—Electrodes of devices having potential barriers
- H10D64/111—Field plates
- H10D64/115—Resistive field plates, e.g. semi-insulating field plates
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D10/00—Bipolar junction transistors [BJT]
- H10D10/40—Vertical BJTs
- H10D10/421—Vertical BJTs having both emitter-base and base-collector junctions ending at the same surface of the body
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D12/00—Bipolar devices controlled by the field effect, e.g. insulated-gate bipolar transistors [IGBT]
- H10D12/411—Insulated-gate bipolar transistors [IGBT]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D18/00—Thyristors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/102—Constructional design considerations for preventing surface leakage or controlling electric field concentration
- H10D62/103—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices
- H10D62/105—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices by having particular doping profiles, shapes or arrangements of PN junctions; by having supplementary regions, e.g. junction termination extension [JTE]
- H10D62/106—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices by having particular doping profiles, shapes or arrangements of PN junctions; by having supplementary regions, e.g. junction termination extension [JTE] having supplementary regions doped oppositely to or in rectifying contact with regions of the semiconductor bodies, e.g. guard rings with PN or Schottky junctions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D8/00—Diodes
- H10D8/411—PN diodes having planar bodies
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D8/00—Diodes
- H10D8/60—Schottky-barrier diodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/102—Constructional design considerations for preventing surface leakage or controlling electric field concentration
- H10D62/112—Constructional design considerations for preventing surface leakage or controlling electric field concentration for preventing surface leakage due to surface inversion layers, e.g. by using channel stoppers
Landscapes
- Electrodes Of Semiconductors (AREA)
- Bipolar Transistors (AREA)
- Thyristors (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB08429410A GB2167229B (en) | 1984-11-21 | 1984-11-21 | Semiconductor devices |
GB8429410 | 1984-11-21 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61127184A JPS61127184A (ja) | 1986-06-14 |
JPH0362309B2 true JPH0362309B2 (en, 2012) | 1991-09-25 |
Family
ID=10570052
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP60256814A Granted JPS61127184A (ja) | 1984-11-21 | 1985-11-18 | 半導体装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US4707719A (en, 2012) |
EP (1) | EP0182422B1 (en, 2012) |
JP (1) | JPS61127184A (en, 2012) |
DE (1) | DE3585364D1 (en, 2012) |
GB (1) | GB2167229B (en, 2012) |
Families Citing this family (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2585331B2 (ja) * | 1986-12-26 | 1997-02-26 | 株式会社東芝 | 高耐圧プレーナ素子 |
GB2201543A (en) * | 1987-02-25 | 1988-09-01 | Philips Electronic Associated | A photosensitive device |
EP0360036B1 (de) * | 1988-09-20 | 1994-06-01 | Siemens Aktiengesellschaft | Planarer pn-Übergang hoher Spannungsfestigkeit |
US5204545A (en) * | 1989-11-22 | 1993-04-20 | Mitsubishi Denki Kabushiki Kaisha | Structure for preventing field concentration in semiconductor device and method of forming the same |
US5075739A (en) * | 1990-01-02 | 1991-12-24 | Motorola, Inc. | High voltage planar edge termination using a punch-through retarding implant and floating field plates |
JP2556175B2 (ja) * | 1990-06-12 | 1996-11-20 | 三菱電機株式会社 | 半導体装置における電界集中防止構造 |
GB9207860D0 (en) * | 1992-04-09 | 1992-05-27 | Philips Electronics Uk Ltd | A semiconductor component |
JP3207615B2 (ja) * | 1992-06-24 | 2001-09-10 | 株式会社東芝 | 半導体装置 |
GB9215653D0 (en) * | 1992-07-23 | 1992-09-09 | Philips Electronics Uk Ltd | A method of manufacturing a semiconductor device comprising an insulated gate field effect device |
GB9216599D0 (en) * | 1992-08-05 | 1992-09-16 | Philips Electronics Uk Ltd | A semiconductor device comprising a vertical insulated gate field effect device and a method of manufacturing such a device |
GB9216953D0 (en) * | 1992-08-11 | 1992-09-23 | Philips Electronics Uk Ltd | A semiconductor component |
JP2956434B2 (ja) * | 1992-10-30 | 1999-10-04 | 株式会社デンソー | 絶縁分離形半導体装置 |
JP3417013B2 (ja) * | 1993-10-18 | 2003-06-16 | 株式会社デンソー | 絶縁ゲート型バイポーラトランジスタ |
JP2850694B2 (ja) * | 1993-03-10 | 1999-01-27 | 株式会社日立製作所 | 高耐圧プレーナ型半導体装置 |
US5750414A (en) * | 1993-09-29 | 1998-05-12 | Siemens Components, Inc. | Method of fabricating a semiconductor device |
CN1040814C (zh) * | 1994-07-20 | 1998-11-18 | 电子科技大学 | 一种用于半导体器件的表面耐压区 |
US5677562A (en) * | 1996-05-14 | 1997-10-14 | General Instrument Corporation Of Delaware | Planar P-N junction semiconductor structure with multilayer passivation |
GB9700923D0 (en) * | 1997-01-17 | 1997-03-05 | Philips Electronics Nv | Semiconductor devices |
DE60029554T2 (de) * | 1999-06-03 | 2007-07-12 | Koninklijke Philips Electronics N.V. | Halbleiterbauelement mit hochspannungselement |
US6373118B1 (en) * | 1999-08-11 | 2002-04-16 | Lewyn Consulting, Inc. | High-value integrated circuit resistor |
JP4024990B2 (ja) * | 2000-04-28 | 2007-12-19 | 株式会社ルネサステクノロジ | 半導体装置 |
JP2005340550A (ja) * | 2004-05-28 | 2005-12-08 | Sanyo Electric Co Ltd | 半導体装置 |
JP2005353991A (ja) * | 2004-06-14 | 2005-12-22 | Sanyo Electric Co Ltd | 半導体装置 |
US7238976B1 (en) * | 2004-06-15 | 2007-07-03 | Qspeed Semiconductor Inc. | Schottky barrier rectifier and method of manufacturing the same |
CN101361194B (zh) * | 2005-12-27 | 2010-12-22 | 美商科斯德半导体股份有限公司 | 用于快速恢复整流器结构的装置及方法 |
JP5195186B2 (ja) * | 2008-09-05 | 2013-05-08 | 三菱電機株式会社 | 半導体装置の製造方法 |
DE102014005879B4 (de) * | 2014-04-16 | 2021-12-16 | Infineon Technologies Ag | Vertikale Halbleitervorrichtung |
JP2016225425A (ja) * | 2015-05-29 | 2016-12-28 | サンケン電気株式会社 | 半導体装置 |
US10424635B2 (en) * | 2016-04-06 | 2019-09-24 | Littelfuse, Inc. | High voltage semiconductor device with guard rings and method associated therewith |
DE102016120301A1 (de) * | 2016-10-25 | 2018-04-26 | Infineon Technologies Ag | Leistungshalbleitervorrichtungs-Abschlussstruktur |
DE102016120300A1 (de) * | 2016-10-25 | 2018-04-26 | Infineon Technologies Austria Ag | Hochspannungsabschlussstruktur einer Leistungshalbleitervorrichtung |
CN111063723B (zh) * | 2019-11-25 | 2021-12-28 | 深圳深爱半导体股份有限公司 | 开关集成控制器 |
CN113437133B (zh) * | 2021-06-22 | 2022-07-22 | 弘大芯源(深圳)半导体有限公司 | 一种耐二次击穿的功率双极晶体管 |
CN114093866B (zh) * | 2021-11-19 | 2023-03-14 | 陕西亚成微电子股份有限公司 | 集成启动装置的mosfet结构及制造方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1260618A (en) * | 1969-08-09 | 1972-01-19 | Soc Gen Semiconduttori Spa | Planar junctions with integrated resistor, for high voltages |
US4157563A (en) * | 1971-07-02 | 1979-06-05 | U.S. Philips Corporation | Semiconductor device |
JPS523277B2 (en, 2012) * | 1973-05-19 | 1977-01-27 | ||
JPS57160159A (en) * | 1981-03-28 | 1982-10-02 | Toshiba Corp | High breakdown voltage planar type semiconductor device |
JPS5976466A (ja) * | 1982-10-25 | 1984-05-01 | Mitsubishi Electric Corp | プレ−ナ形半導体装置 |
GB2131603B (en) * | 1982-12-03 | 1985-12-18 | Philips Electronic Associated | Semiconductor devices |
-
1984
- 1984-11-21 GB GB08429410A patent/GB2167229B/en not_active Expired
-
1985
- 1985-10-21 US US06/789,972 patent/US4707719A/en not_active Expired - Lifetime
- 1985-11-08 DE DE8585201810T patent/DE3585364D1/de not_active Expired - Lifetime
- 1985-11-08 EP EP19850201810 patent/EP0182422B1/en not_active Expired
- 1985-11-18 JP JP60256814A patent/JPS61127184A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
EP0182422A3 (en) | 1988-01-07 |
GB2167229B (en) | 1988-07-20 |
EP0182422B1 (en) | 1992-02-05 |
JPS61127184A (ja) | 1986-06-14 |
GB8429410D0 (en) | 1985-01-03 |
EP0182422A2 (en) | 1986-05-28 |
DE3585364D1 (de) | 1992-03-19 |
US4707719A (en) | 1987-11-17 |
GB2167229A (en) | 1986-05-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPH0362309B2 (en, 2012) | ||
US4422089A (en) | Semiconductor device having a reduced surface field strength | |
KR100330847B1 (ko) | 반절연층을갖는반도체장치 | |
US6190948B1 (en) | Method of forming power semiconductor devices having overlapping floating field plates for improving breakdown voltage capability | |
US4754310A (en) | High voltage semiconductor device | |
US6621107B2 (en) | Trench DMOS transistor with embedded trench schottky rectifier | |
US4157563A (en) | Semiconductor device | |
US6184555B1 (en) | Field effect-controlled semiconductor component | |
EP0132861B1 (en) | Semiconductor device comprising a field effect transistor | |
USRE41509E1 (en) | High voltage vertical conduction superjunction semiconductor device | |
US5324971A (en) | Power semiconductor device having over voltage protection | |
JP2968222B2 (ja) | 半導体装置及びシリコンウエハの調製方法 | |
US5486718A (en) | High voltage planar edge termination structure and method of making same | |
JPS59141267A (ja) | 半導体装置 | |
US4929991A (en) | Rugged lateral DMOS transistor structure | |
JPH0127592B2 (en, 2012) | ||
US5973338A (en) | Insulated gate type bipolar-transistor | |
US6686625B2 (en) | Field effect-controllable semiconductor component with two-directional blocking, and a method of producing the semiconductor component | |
WO1982002981A1 (en) | Mos power transistor | |
EP0110320B1 (en) | A mos transistor | |
EP0117867A1 (en) | Semiconductor device | |
EP1184908B1 (en) | Field effect transistor | |
US4165516A (en) | Semiconductor device and method of manufacturing same | |
US5444292A (en) | Integrated thin film approach to achieve high ballast levels for overlay structures | |
JPH07211897A (ja) | 高電圧用半導体素子 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |