JPH0360353B2 - - Google Patents
Info
- Publication number
- JPH0360353B2 JPH0360353B2 JP14901483A JP14901483A JPH0360353B2 JP H0360353 B2 JPH0360353 B2 JP H0360353B2 JP 14901483 A JP14901483 A JP 14901483A JP 14901483 A JP14901483 A JP 14901483A JP H0360353 B2 JPH0360353 B2 JP H0360353B2
- Authority
- JP
- Japan
- Prior art keywords
- titanium
- organic
- thin film
- forming
- oxide thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010409 thin film Substances 0.000 claims description 64
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 47
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 46
- 150000003609 titanium compounds Chemical class 0.000 claims description 38
- 239000010936 titanium Substances 0.000 claims description 34
- 239000000203 mixture Substances 0.000 claims description 29
- 229910052719 titanium Inorganic materials 0.000 claims description 26
- 229920000642 polymer Polymers 0.000 claims description 24
- -1 titanium alkoxides Chemical class 0.000 claims description 21
- 229940126062 Compound A Drugs 0.000 claims description 17
- NLDMNSXOCDLTTB-UHFFFAOYSA-N Heterophylliin A Natural products O1C2COC(=O)C3=CC(O)=C(O)C(O)=C3C3=C(O)C(O)=C(O)C=C3C(=O)OC2C(OC(=O)C=2C=C(O)C(O)=C(O)C=2)C(O)C1OC(=O)C1=CC(O)=C(O)C(O)=C1 NLDMNSXOCDLTTB-UHFFFAOYSA-N 0.000 claims description 17
- 229910010413 TiO 2 Inorganic materials 0.000 claims description 11
- 239000003960 organic solvent Substances 0.000 claims description 11
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 9
- 150000002894 organic compounds Chemical class 0.000 claims description 8
- 239000013522 chelant Substances 0.000 claims description 7
- 125000004432 carbon atom Chemical group C* 0.000 claims description 6
- 150000001735 carboxylic acids Chemical class 0.000 claims description 5
- 150000002430 hydrocarbons Chemical group 0.000 claims description 5
- 125000003545 alkoxy group Chemical group 0.000 claims description 4
- 125000005907 alkyl ester group Chemical group 0.000 claims description 4
- 150000001414 amino alcohols Chemical class 0.000 claims description 2
- 229940058905 antimony compound for treatment of leishmaniasis and trypanosomiasis Drugs 0.000 claims description 2
- 150000001463 antimony compounds Chemical class 0.000 claims description 2
- 150000001495 arsenic compounds Chemical class 0.000 claims description 2
- 150000004718 beta keto acids Chemical class 0.000 claims description 2
- 150000001639 boron compounds Chemical class 0.000 claims description 2
- 239000003795 chemical substances by application Substances 0.000 claims description 2
- 150000002009 diols Chemical class 0.000 claims description 2
- 238000007496 glass forming Methods 0.000 claims description 2
- 229940093920 gynecological arsenic compound Drugs 0.000 claims description 2
- 150000004715 keto acids Chemical class 0.000 claims description 2
- 125000001424 substituent group Chemical group 0.000 claims description 2
- 150000004716 alpha keto acids Chemical class 0.000 claims 1
- 150000003018 phosphorus compounds Chemical class 0.000 claims 1
- 239000010408 film Substances 0.000 description 37
- 238000000576 coating method Methods 0.000 description 25
- 239000011248 coating agent Substances 0.000 description 19
- YRKCREAYFQTBPV-UHFFFAOYSA-N acetylacetone Chemical compound CC(=O)CC(C)=O YRKCREAYFQTBPV-UHFFFAOYSA-N 0.000 description 14
- 238000000034 method Methods 0.000 description 14
- 230000003287 optical effect Effects 0.000 description 14
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 12
- 239000007788 liquid Substances 0.000 description 12
- 239000000758 substrate Substances 0.000 description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- 229910052814 silicon oxide Inorganic materials 0.000 description 10
- 239000002738 chelating agent Substances 0.000 description 9
- 239000011229 interlayer Substances 0.000 description 7
- 229910044991 metal oxide Inorganic materials 0.000 description 7
- 150000004706 metal oxides Chemical class 0.000 description 7
- 229910004298 SiO 2 Inorganic materials 0.000 description 6
- 150000001732 carboxylic acid derivatives Chemical group 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 239000010410 layer Substances 0.000 description 5
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 4
- JVTAAEKCZFNVCJ-UHFFFAOYSA-N lactic acid Chemical compound CC(O)C(O)=O JVTAAEKCZFNVCJ-UHFFFAOYSA-N 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000006116 polymerization reaction Methods 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- VXUYXOFXAQZZMF-UHFFFAOYSA-N titanium(IV) isopropoxide Chemical compound CC(C)O[Ti](OC(C)C)(OC(C)C)OC(C)C VXUYXOFXAQZZMF-UHFFFAOYSA-N 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 3
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000003786 synthesis reaction Methods 0.000 description 3
- AEMRFAOFKBGASW-UHFFFAOYSA-N Glycolic acid Chemical compound OCC(O)=O AEMRFAOFKBGASW-UHFFFAOYSA-N 0.000 description 2
- WRQNANDWMGAFTP-UHFFFAOYSA-N Methylacetoacetic acid Chemical compound COC(=O)CC(C)=O WRQNANDWMGAFTP-UHFFFAOYSA-N 0.000 description 2
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 2
- 150000001298 alcohols Chemical class 0.000 description 2
- 150000004703 alkoxides Chemical class 0.000 description 2
- FPCJKVGGYOAWIZ-UHFFFAOYSA-N butan-1-ol;titanium Chemical compound [Ti].CCCCO.CCCCO.CCCCO.CCCCO FPCJKVGGYOAWIZ-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- XBDQKXXYIPTUBI-UHFFFAOYSA-N dimethylselenoniopropionate Natural products CCC(O)=O XBDQKXXYIPTUBI-UHFFFAOYSA-N 0.000 description 2
- 238000007598 dipping method Methods 0.000 description 2
- XYIBRDXRRQCHLP-UHFFFAOYSA-N ethyl acetoacetate Chemical compound CCOC(=O)CC(C)=O XYIBRDXRRQCHLP-UHFFFAOYSA-N 0.000 description 2
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 125000001183 hydrocarbyl group Chemical group 0.000 description 2
- 239000004310 lactic acid Substances 0.000 description 2
- 235000014655 lactic acid Nutrition 0.000 description 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 2
- 230000000379 polymerizing effect Effects 0.000 description 2
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
- 239000005361 soda-lime glass Substances 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- OVSGBKZKXUMMHS-VGKOASNMSA-L (z)-4-oxopent-2-en-2-olate;propan-2-olate;titanium(4+) Chemical compound [Ti+4].CC(C)[O-].CC(C)[O-].C\C([O-])=C\C(C)=O.C\C([O-])=C\C(C)=O OVSGBKZKXUMMHS-VGKOASNMSA-L 0.000 description 1
- CVBUKMMMRLOKQR-UHFFFAOYSA-N 1-phenylbutane-1,3-dione Chemical compound CC(=O)CC(=O)C1=CC=CC=C1 CVBUKMMMRLOKQR-UHFFFAOYSA-N 0.000 description 1
- RWLALWYNXFYRGW-UHFFFAOYSA-N 2-Ethyl-1,3-hexanediol Chemical compound CCCC(O)C(CC)CO RWLALWYNXFYRGW-UHFFFAOYSA-N 0.000 description 1
- SDVJLFHTPKRNAH-UHFFFAOYSA-N 2-ethyl-3-ketopentanoic acid Chemical compound CCC(C(O)=O)C(=O)CC SDVJLFHTPKRNAH-UHFFFAOYSA-N 0.000 description 1
- SRLPPRVVQNACSW-UHFFFAOYSA-L 2-hydroxypropanoate;titanium(2+) Chemical compound [Ti+2].CC(O)C([O-])=O.CC(O)C([O-])=O SRLPPRVVQNACSW-UHFFFAOYSA-L 0.000 description 1
- WDJHALXBUFZDSR-UHFFFAOYSA-N Acetoacetic acid Natural products CC(=O)CC(O)=O WDJHALXBUFZDSR-UHFFFAOYSA-N 0.000 description 1
- FERIUCNNQQJTOY-UHFFFAOYSA-N Butyric acid Chemical group CCCC(O)=O FERIUCNNQQJTOY-UHFFFAOYSA-N 0.000 description 1
- KPWIZLJDXFLIAL-UHFFFAOYSA-L CC(C)O[Ti++]OC(C)C.CC(C)CCCCCCCCCCCCCCC([O-])=O.CC(C)CCCCCCCCCCCCCCC([O-])=O Chemical compound CC(C)O[Ti++]OC(C)C.CC(C)CCCCCCCCCCCCCCC([O-])=O.CC(C)CCCCCCCCCCCCCCC([O-])=O KPWIZLJDXFLIAL-UHFFFAOYSA-L 0.000 description 1
- TVTASDGODSYCJX-UHFFFAOYSA-N CCCCO[Ti](OC)(OC)OCCCC Chemical compound CCCCO[Ti](OC)(OC)OCCCC TVTASDGODSYCJX-UHFFFAOYSA-N 0.000 description 1
- MCALDHMLXICSKJ-UHFFFAOYSA-N CCO[Ti](OCC)(OC(C)C)OC(C)C Chemical compound CCO[Ti](OCC)(OC(C)C)OC(C)C MCALDHMLXICSKJ-UHFFFAOYSA-N 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 235000021355 Stearic acid Nutrition 0.000 description 1
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 125000005595 acetylacetonate group Chemical group 0.000 description 1
- 230000003667 anti-reflective effect Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- UFMZWBIQTDUYBN-UHFFFAOYSA-N cobalt dinitrate Chemical compound [Co+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O UFMZWBIQTDUYBN-UHFFFAOYSA-N 0.000 description 1
- 229910001981 cobalt nitrate Inorganic materials 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- WOWBFOBYOAGEEA-UHFFFAOYSA-N diafenthiuron Chemical compound CC(C)C1=C(NC(=S)NC(C)(C)C)C(C(C)C)=CC(OC=2C=CC=CC=2)=C1 WOWBFOBYOAGEEA-UHFFFAOYSA-N 0.000 description 1
- QEHKWLKYFXJVLL-UHFFFAOYSA-N dichloro(dimethoxy)silane Chemical compound CO[Si](Cl)(Cl)OC QEHKWLKYFXJVLL-UHFFFAOYSA-N 0.000 description 1
- YQXMTBNPTAUIMR-UHFFFAOYSA-N diethyl dipropan-2-yl silicate Chemical compound CCO[Si](OCC)(OC(C)C)OC(C)C YQXMTBNPTAUIMR-UHFFFAOYSA-N 0.000 description 1
- IJKVHSBPTUYDLN-UHFFFAOYSA-N dihydroxy(oxo)silane Chemical compound O[Si](O)=O IJKVHSBPTUYDLN-UHFFFAOYSA-N 0.000 description 1
- XGZNHFPFJRZBBT-UHFFFAOYSA-N ethanol;titanium Chemical compound [Ti].CCO.CCO.CCO.CCO XGZNHFPFJRZBBT-UHFFFAOYSA-N 0.000 description 1
- 235000019439 ethyl acetate Nutrition 0.000 description 1
- 229960005082 etohexadiol Drugs 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 150000002484 inorganic compounds Chemical class 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 150000002611 lead compounds Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- ZEIWWVGGEOHESL-UHFFFAOYSA-N methanol;titanium Chemical compound [Ti].OC.OC.OC.OC ZEIWWVGGEOHESL-UHFFFAOYSA-N 0.000 description 1
- 239000012046 mixed solvent Substances 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- KBJMLQFLOWQJNF-UHFFFAOYSA-N nickel(ii) nitrate Chemical compound [Ni+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O KBJMLQFLOWQJNF-UHFFFAOYSA-N 0.000 description 1
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 description 1
- OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 description 1
- 150000002903 organophosphorus compounds Chemical class 0.000 description 1
- 150000003961 organosilicon compounds Chemical class 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 150000003112 potassium compounds Chemical class 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 235000019260 propionic acid Nutrition 0.000 description 1
- IUVKMZGDUIUOCP-BTNSXGMBSA-N quinbolone Chemical compound O([C@H]1CC[C@H]2[C@H]3[C@@H]([C@]4(C=CC(=O)C=C4CC3)C)CC[C@@]21C)C1=CCCC1 IUVKMZGDUIUOCP-BTNSXGMBSA-N 0.000 description 1
- 239000010865 sewage Substances 0.000 description 1
- 150000003377 silicon compounds Chemical class 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000008117 stearic acid Substances 0.000 description 1
- UQMOLLPKNHFRAC-UHFFFAOYSA-N tetrabutyl silicate Chemical compound CCCCO[Si](OCCCC)(OCCCC)OCCCC UQMOLLPKNHFRAC-UHFFFAOYSA-N 0.000 description 1
- LFQCEHFDDXELDD-UHFFFAOYSA-N tetramethyl orthosilicate Chemical compound CO[Si](OC)(OC)OC LFQCEHFDDXELDD-UHFFFAOYSA-N 0.000 description 1
- ZUEKXCXHTXJYAR-UHFFFAOYSA-N tetrapropan-2-yl silicate Chemical compound CC(C)O[Si](OC(C)C)(OC(C)C)OC(C)C ZUEKXCXHTXJYAR-UHFFFAOYSA-N 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 150000003606 tin compounds Chemical class 0.000 description 1
- XJDNKRIXUMDJCW-UHFFFAOYSA-J titanium tetrachloride Chemical compound Cl[Ti](Cl)(Cl)Cl XJDNKRIXUMDJCW-UHFFFAOYSA-J 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 150000003752 zinc compounds Chemical class 0.000 description 1
Landscapes
- Optical Filters (AREA)
- Paints Or Removers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14901483A JPS6040171A (ja) | 1983-08-15 | 1983-08-15 | 酸化チタン薄膜形成用組成物 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14901483A JPS6040171A (ja) | 1983-08-15 | 1983-08-15 | 酸化チタン薄膜形成用組成物 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6040171A JPS6040171A (ja) | 1985-03-02 |
| JPH0360353B2 true JPH0360353B2 (enrdf_load_html_response) | 1991-09-13 |
Family
ID=15465782
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14901483A Granted JPS6040171A (ja) | 1983-08-15 | 1983-08-15 | 酸化チタン薄膜形成用組成物 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6040171A (enrdf_load_html_response) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4807020B2 (ja) * | 2005-09-21 | 2011-11-02 | 東洋製罐株式会社 | 半導体微粒子分散用バインダー組成物の製造方法 |
| JP4745261B2 (ja) * | 2007-02-07 | 2011-08-10 | 双葉電子工業株式会社 | 表示素子 |
-
1983
- 1983-08-15 JP JP14901483A patent/JPS6040171A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6040171A (ja) | 1985-03-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5091009A (en) | Coating composition and a process for manufacturing the same | |
| JP3351666B2 (ja) | 防曇性反射防止膜、光学部品、及び防曇性反射防止膜の製造方法 | |
| JP2716302B2 (ja) | マイクロピット状表層を有する酸化物薄膜および該薄膜を用いた多層膜、ならびにその形成法 | |
| JP2002509516A (ja) | 高い反射率を有する被覆基体 | |
| JPS6043608A (ja) | 管球 | |
| JP2589291B2 (ja) | 虹彩抑制方法 | |
| JPH0633000A (ja) | 液晶表示素子用高屈折率絶縁被膜形成用塗布液 | |
| JPH0360353B2 (enrdf_load_html_response) | ||
| JP2946569B2 (ja) | 高耐熱性高屈折率複合酸化物薄膜形成用組成物 | |
| JPS6150903B2 (enrdf_load_html_response) | ||
| JPH0260397B2 (enrdf_load_html_response) | ||
| JPH08337438A (ja) | 紫外線吸収被膜形成用中間層組成物及び紫外線吸収ガラス | |
| JP2938106B2 (ja) | 高耐熱性高屈折率複合酸化物薄膜 | |
| JPH03135502A (ja) | 高耐熱性高屈折率複合酸化物薄膜、その形成用組成物及び白熱電球 | |
| JPH0248403A (ja) | 透明セラミックス被膜形成用塗布液および透明セラミックス被膜付基材 | |
| JPS62177501A (ja) | 高屈折率複合酸化物薄膜形成用組成物 | |
| JP3769810B2 (ja) | 可視光遮光性皮膜形成用塗布液、可視光遮光性皮膜形成方法および多層膜 | |
| JPH0374361B2 (enrdf_load_html_response) | ||
| JPH0756522B2 (ja) | 光干渉膜 | |
| JP3988240B2 (ja) | 酸化物膜形成用塗布液、酸化物膜形成方法および酸化物膜付き物品 | |
| JPH0971438A (ja) | 被膜形成用組成物 | |
| JPH0230765A (ja) | 酸化錫被覆の形成方法 | |
| JPH01116082A (ja) | 透明酸化物薄膜用塗布液の製造方法および透明酸化物薄膜付基材 | |
| JPH0648776A (ja) | 透明酸化物膜および赤外線反射性ガラスの製造方法 | |
| JPH05116988A (ja) | ハーフミラー用複合酸化物薄膜 |