JPH0331077Y2 - - Google Patents

Info

Publication number
JPH0331077Y2
JPH0331077Y2 JP1984185270U JP18527084U JPH0331077Y2 JP H0331077 Y2 JPH0331077 Y2 JP H0331077Y2 JP 1984185270 U JP1984185270 U JP 1984185270U JP 18527084 U JP18527084 U JP 18527084U JP H0331077 Y2 JPH0331077 Y2 JP H0331077Y2
Authority
JP
Japan
Prior art keywords
wafer
stage
prober
recess
probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984185270U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61100138U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984185270U priority Critical patent/JPH0331077Y2/ja
Publication of JPS61100138U publication Critical patent/JPS61100138U/ja
Application granted granted Critical
Publication of JPH0331077Y2 publication Critical patent/JPH0331077Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1984185270U 1984-12-05 1984-12-05 Expired JPH0331077Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984185270U JPH0331077Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1984-12-05 1984-12-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984185270U JPH0331077Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1984-12-05 1984-12-05

Publications (2)

Publication Number Publication Date
JPS61100138U JPS61100138U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-06-26
JPH0331077Y2 true JPH0331077Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-07-01

Family

ID=30742748

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984185270U Expired JPH0331077Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1984-12-05 1984-12-05

Country Status (1)

Country Link
JP (1) JPH0331077Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5470766B2 (ja) * 2008-07-18 2014-04-16 株式会社Ｓｕｍｃｏ 半導体デバイスの製造方法
JP2015049137A (ja) * 2013-09-02 2015-03-16 三菱電機株式会社 半導体チップ試験装置及び方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4123701Y1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1966-02-22 1966-12-02
JPS546867U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1977-06-16 1979-01-17
JPS56147076A (en) * 1980-04-18 1981-11-14 Hitachi Ltd Characteristic testing electrode
JPS6080772A (ja) * 1983-10-08 1985-05-08 Rohm Co Ltd プロ−ブニ−ドル

Also Published As

Publication number Publication date
JPS61100138U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-06-26

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