JPH0327454B2 - - Google Patents
Info
- Publication number
- JPH0327454B2 JPH0327454B2 JP60231933A JP23193385A JPH0327454B2 JP H0327454 B2 JPH0327454 B2 JP H0327454B2 JP 60231933 A JP60231933 A JP 60231933A JP 23193385 A JP23193385 A JP 23193385A JP H0327454 B2 JPH0327454 B2 JP H0327454B2
- Authority
- JP
- Japan
- Prior art keywords
- movable body
- electromagnet
- linear motor
- box
- shaped duct
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)
- Non-Mechanical Conveyors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23193385A JPS6293120A (ja) | 1985-10-16 | 1985-10-16 | リニアモ−タ使用の荷搬送装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23193385A JPS6293120A (ja) | 1985-10-16 | 1985-10-16 | リニアモ−タ使用の荷搬送装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6293120A JPS6293120A (ja) | 1987-04-28 |
JPH0327454B2 true JPH0327454B2 (enrdf_load_stackoverflow) | 1991-04-16 |
Family
ID=16931337
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP23193385A Granted JPS6293120A (ja) | 1985-10-16 | 1985-10-16 | リニアモ−タ使用の荷搬送装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6293120A (enrdf_load_stackoverflow) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0638427Y2 (ja) * | 1987-06-16 | 1994-10-05 | 東京エレクトロン東北株式会社 | 磁気浮上型ウエハ搬送装置 |
JPH0759208A (ja) * | 1993-08-13 | 1995-03-03 | Murata Mach Ltd | リニア搬送台車の保持装置 |
CN101808776B (zh) * | 2007-09-07 | 2012-07-18 | 东北精机工业株式会社 | 太阳能电池组件搬运线 |
JP2009176161A (ja) * | 2008-01-25 | 2009-08-06 | Toshiba Corp | 電子機器 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60170401A (ja) * | 1984-02-14 | 1985-09-03 | Toshiba Corp | 浮上式搬送装置 |
-
1985
- 1985-10-16 JP JP23193385A patent/JPS6293120A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6293120A (ja) | 1987-04-28 |
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