JPH0314774Y2 - - Google Patents
Info
- Publication number
- JPH0314774Y2 JPH0314774Y2 JP20190483U JP20190483U JPH0314774Y2 JP H0314774 Y2 JPH0314774 Y2 JP H0314774Y2 JP 20190483 U JP20190483 U JP 20190483U JP 20190483 U JP20190483 U JP 20190483U JP H0314774 Y2 JPH0314774 Y2 JP H0314774Y2
- Authority
- JP
- Japan
- Prior art keywords
- curve
- pressure
- vacuum
- standard
- standard exhaust
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010586 diagram Methods 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000004044 response Effects 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20190483U JPS60110971U (ja) | 1983-12-28 | 1983-12-28 | 真空装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20190483U JPS60110971U (ja) | 1983-12-28 | 1983-12-28 | 真空装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60110971U JPS60110971U (ja) | 1985-07-27 |
| JPH0314774Y2 true JPH0314774Y2 (enrdf_load_stackoverflow) | 1991-04-02 |
Family
ID=30764122
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20190483U Granted JPS60110971U (ja) | 1983-12-28 | 1983-12-28 | 真空装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60110971U (enrdf_load_stackoverflow) |
-
1983
- 1983-12-28 JP JP20190483U patent/JPS60110971U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60110971U (ja) | 1985-07-27 |
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