JPH0314670Y2 - - Google Patents

Info

Publication number
JPH0314670Y2
JPH0314670Y2 JP1984039660U JP3966084U JPH0314670Y2 JP H0314670 Y2 JPH0314670 Y2 JP H0314670Y2 JP 1984039660 U JP1984039660 U JP 1984039660U JP 3966084 U JP3966084 U JP 3966084U JP H0314670 Y2 JPH0314670 Y2 JP H0314670Y2
Authority
JP
Japan
Prior art keywords
protective layer
substrate
grip
photoresist
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984039660U
Other languages
English (en)
Japanese (ja)
Other versions
JPS60152152U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3966084U priority Critical patent/JPS60152152U/ja
Publication of JPS60152152U publication Critical patent/JPS60152152U/ja
Application granted granted Critical
Publication of JPH0314670Y2 publication Critical patent/JPH0314670Y2/ja
Granted legal-status Critical Current

Links

JP3966084U 1984-03-19 1984-03-19 フオトレジスト基板の処理装置 Granted JPS60152152U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3966084U JPS60152152U (ja) 1984-03-19 1984-03-19 フオトレジスト基板の処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3966084U JPS60152152U (ja) 1984-03-19 1984-03-19 フオトレジスト基板の処理装置

Publications (2)

Publication Number Publication Date
JPS60152152U JPS60152152U (ja) 1985-10-09
JPH0314670Y2 true JPH0314670Y2 (cs) 1991-04-02

Family

ID=30547814

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3966084U Granted JPS60152152U (ja) 1984-03-19 1984-03-19 フオトレジスト基板の処理装置

Country Status (1)

Country Link
JP (1) JPS60152152U (cs)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2657558A1 (de) * 1976-12-18 1978-06-22 Basf Ag Vorrichtung zum behandeln von druckplatten
JPS58178348A (ja) * 1982-04-13 1983-10-19 Nippon Synthetic Chem Ind Co Ltd:The 画像形成法

Also Published As

Publication number Publication date
JPS60152152U (ja) 1985-10-09

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