JPS6331120B2 - - Google Patents
Info
- Publication number
- JPS6331120B2 JPS6331120B2 JP8689982A JP8689982A JPS6331120B2 JP S6331120 B2 JPS6331120 B2 JP S6331120B2 JP 8689982 A JP8689982 A JP 8689982A JP 8689982 A JP8689982 A JP 8689982A JP S6331120 B2 JPS6331120 B2 JP S6331120B2
- Authority
- JP
- Japan
- Prior art keywords
- protective layer
- photoresist substrate
- roller
- liquid
- photoresist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 18
- 229920002120 photoresistant polymer Polymers 0.000 claims description 17
- 239000011241 protective layer Substances 0.000 claims description 15
- 239000007788 liquid Substances 0.000 claims description 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 229920005989 resin Polymers 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 239000004372 Polyvinyl alcohol Substances 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229920002451 polyvinyl alcohol Polymers 0.000 description 3
- 239000003960 organic solvent Substances 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- -1 polyethylene Polymers 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 230000008961 swelling Effects 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Manufacturing Of Printed Circuit Boards (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8689982A JPS58204590A (ja) | 1982-05-22 | 1982-05-22 | フオトレジスト基板の処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8689982A JPS58204590A (ja) | 1982-05-22 | 1982-05-22 | フオトレジスト基板の処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58204590A JPS58204590A (ja) | 1983-11-29 |
| JPS6331120B2 true JPS6331120B2 (cs) | 1988-06-22 |
Family
ID=13899676
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8689982A Granted JPS58204590A (ja) | 1982-05-22 | 1982-05-22 | フオトレジスト基板の処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58204590A (cs) |
-
1982
- 1982-05-22 JP JP8689982A patent/JPS58204590A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58204590A (ja) | 1983-11-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0379777A (ja) | パターン化した薄いフィルムを作る方法 | |
| US4922938A (en) | Apparatus for single side spray processing of printed circuit boards | |
| WO2014196099A1 (ja) | 洗浄方法及び洗浄装置 | |
| JPS6331120B2 (cs) | ||
| JPH0256656B2 (cs) | ||
| JP5957650B2 (ja) | 除染方法およびドライアイス打ち込みシステム並びに除染システム | |
| JPH0331961Y2 (cs) | ||
| JP2004296810A (ja) | 基板のエッチング装置及びエッチング方法 | |
| JPH0314670Y2 (cs) | ||
| JP2003024865A (ja) | フィルム基板の湿式処理方法及び湿式処理装置 | |
| JP3732435B2 (ja) | 洗浄装置 | |
| KR101882916B1 (ko) | 마스크 제조 시스템 | |
| KR101891570B1 (ko) | 마스크 제조용 롤 시트 가공장치 및 그를 구비하는 마스크 제조 시스템 | |
| KR101889967B1 (ko) | 캐리어 반전장치 및 이를 구비하는 마스크 제조 시스템 | |
| KR101860413B1 (ko) | 마스크 제조 시스템 | |
| KR101891206B1 (ko) | 마스크 제조용 롤 시트 가공장치 및 그를 구비하는 마스크 제조 시스템 | |
| JPS62146698A (ja) | 転写印刷方法 | |
| JP2606150B2 (ja) | ウエット処理装置 | |
| JPS62264622A (ja) | 半導体製造装置 | |
| JPH06122981A (ja) | 表面処理装置 | |
| JPH0465527B2 (cs) | ||
| JP2004074811A (ja) | スクリーン裏ぶき方式及びスクリーン裏ぶき方法 | |
| KR20250062832A (ko) | 마스크 제조 시스템 | |
| JPH0254782A (ja) | 片面連続腐食方法及び装置 | |
| JPH01188444A (ja) | ウェットエッチング方法 |