JPH0313140B2 - - Google Patents

Info

Publication number
JPH0313140B2
JPH0313140B2 JP60135086A JP13508685A JPH0313140B2 JP H0313140 B2 JPH0313140 B2 JP H0313140B2 JP 60135086 A JP60135086 A JP 60135086A JP 13508685 A JP13508685 A JP 13508685A JP H0313140 B2 JPH0313140 B2 JP H0313140B2
Authority
JP
Japan
Prior art keywords
cartridge
basket
wafer
wafers
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60135086A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61291335A (ja
Inventor
Seijiro Kawada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denkoh Co Ltd
Original Assignee
Denkoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denkoh Co Ltd filed Critical Denkoh Co Ltd
Priority to JP13508685A priority Critical patent/JPS61291335A/ja
Publication of JPS61291335A publication Critical patent/JPS61291335A/ja
Publication of JPH0313140B2 publication Critical patent/JPH0313140B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP13508685A 1985-06-19 1985-06-19 半導体移換え装置 Granted JPS61291335A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13508685A JPS61291335A (ja) 1985-06-19 1985-06-19 半導体移換え装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13508685A JPS61291335A (ja) 1985-06-19 1985-06-19 半導体移換え装置

Publications (2)

Publication Number Publication Date
JPS61291335A JPS61291335A (ja) 1986-12-22
JPH0313140B2 true JPH0313140B2 (enrdf_load_html_response) 1991-02-21

Family

ID=15143501

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13508685A Granted JPS61291335A (ja) 1985-06-19 1985-06-19 半導体移換え装置

Country Status (1)

Country Link
JP (1) JPS61291335A (enrdf_load_html_response)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2539447B2 (ja) * 1987-08-12 1996-10-02 株式会社日立製作所 枚葉キャリアによる生産方法
US5164905A (en) * 1987-08-12 1992-11-17 Hitachi, Ltd. Production system with order of processing determination
JP2519096B2 (ja) * 1988-02-12 1996-07-31 東京エレクトロン株式会社 処理装置及びレジスト処理装置及び処理方法及びレジスト処理方法
US4867631A (en) * 1988-04-25 1989-09-19 Tegal Corporation Spatula for wafer transport
US4984954A (en) * 1988-04-25 1991-01-15 Warenback Douglas H Spatula for wafer transport
US5217340A (en) * 1989-01-28 1993-06-08 Kokusai Electric Co., Ltd. Wafer transfer mechanism in vertical CVD diffusion apparatus
JPH07105357B2 (ja) * 1989-01-28 1995-11-13 国際電気株式会社 縦型ｃｖｄ拡散装置に於けるウェーハ移載方法及び装置
JP2719718B2 (ja) * 1989-03-20 1998-02-25 東京エレクトロン株式会社 熱処理装置
JPH085160Y2 (ja) * 1989-05-15 1996-02-14 カシオ計算機株式会社 基板移し替え治具
JP3069575B2 (ja) * 1990-03-09 2000-07-24 東京エレクトロン株式会社 縦型熱処理装置
JP2748155B2 (ja) * 1989-07-17 1998-05-06 東京エレクトロン株式会社 熱処理装置
JP2905857B2 (ja) * 1989-08-11 1999-06-14 東京エレクトロン株式会社 縦型処理装置
US5055036A (en) * 1991-02-26 1991-10-08 Tokyo Electron Sagami Limited Method of loading and unloading wafer boat
JPH0546839U (ja) * 1991-11-29 1993-06-22 株式会社藤森技術研究所 液晶基板移載装置
KR100203782B1 (ko) * 1996-09-05 1999-06-15 윤종용 반도체 웨이퍼 열처리장치
FR2778496B1 (fr) 1998-05-05 2002-04-19 Recif Sa Procede et dispositif de changement de position d'une plaque de semi-conducteur
FR2835337B1 (fr) 2002-01-29 2004-08-20 Recif Sa Procede et dispositif d'identification de caracteres inscrits sur une plaque de semi-conducteur comportant au moins une marque d'orientation

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5860553A (ja) * 1981-10-05 1983-04-11 Tokyo Denshi Kagaku Kabushiki 縦型自動プラズマ処理装置
JPS61131836U (enrdf_load_html_response) * 1985-02-06 1986-08-18

Also Published As

Publication number Publication date
JPS61291335A (ja) 1986-12-22

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