JPH0239095B2 - - Google Patents

Info

Publication number
JPH0239095B2
JPH0239095B2 JP56192220A JP19222081A JPH0239095B2 JP H0239095 B2 JPH0239095 B2 JP H0239095B2 JP 56192220 A JP56192220 A JP 56192220A JP 19222081 A JP19222081 A JP 19222081A JP H0239095 B2 JPH0239095 B2 JP H0239095B2
Authority
JP
Japan
Prior art keywords
film
gate electrode
semiconductor device
polycrystalline silicon
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56192220A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5893374A (ja
Inventor
Hiroshi Momose
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP56192220A priority Critical patent/JPS5893374A/ja
Publication of JPS5893374A publication Critical patent/JPS5893374A/ja
Publication of JPH0239095B2 publication Critical patent/JPH0239095B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]

Landscapes

  • Drying Of Semiconductors (AREA)
JP56192220A 1981-11-30 1981-11-30 Ｍｏｓ型半導体装置の製造方法 Granted JPS5893374A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56192220A JPS5893374A (ja) 1981-11-30 1981-11-30 Ｍｏｓ型半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56192220A JPS5893374A (ja) 1981-11-30 1981-11-30 Ｍｏｓ型半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5893374A JPS5893374A (ja) 1983-06-03
JPH0239095B2 true JPH0239095B2 (enrdf_load_stackoverflow) 1990-09-04

Family

ID=16287654

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56192220A Granted JPS5893374A (ja) 1981-11-30 1981-11-30 Ｍｏｓ型半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS5893374A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6358838A (ja) * 1986-08-28 1988-03-14 Fujitsu Ltd 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS5893374A (ja) 1983-06-03

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