JPH0238440Y2 - - Google Patents

Info

Publication number
JPH0238440Y2
JPH0238440Y2 JP1986101620U JP10162086U JPH0238440Y2 JP H0238440 Y2 JPH0238440 Y2 JP H0238440Y2 JP 1986101620 U JP1986101620 U JP 1986101620U JP 10162086 U JP10162086 U JP 10162086U JP H0238440 Y2 JPH0238440 Y2 JP H0238440Y2
Authority
JP
Japan
Prior art keywords
processing liquid
sub
substrate
liquid
drain
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986101620U
Other languages
English (en)
Japanese (ja)
Other versions
JPS639131U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986101620U priority Critical patent/JPH0238440Y2/ja
Publication of JPS639131U publication Critical patent/JPS639131U/ja
Application granted granted Critical
Publication of JPH0238440Y2 publication Critical patent/JPH0238440Y2/ja
Expired legal-status Critical Current

Links

JP1986101620U 1986-07-02 1986-07-02 Expired JPH0238440Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986101620U JPH0238440Y2 (enExample) 1986-07-02 1986-07-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986101620U JPH0238440Y2 (enExample) 1986-07-02 1986-07-02

Publications (2)

Publication Number Publication Date
JPS639131U JPS639131U (enExample) 1988-01-21
JPH0238440Y2 true JPH0238440Y2 (enExample) 1990-10-17

Family

ID=30972511

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986101620U Expired JPH0238440Y2 (enExample) 1986-07-02 1986-07-02

Country Status (1)

Country Link
JP (1) JPH0238440Y2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001319849A (ja) * 2000-05-08 2001-11-16 Tokyo Electron Ltd 液処理装置及び液処理方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3359208B2 (ja) * 1995-11-28 2002-12-24 大日本スクリーン製造株式会社 現像装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001319849A (ja) * 2000-05-08 2001-11-16 Tokyo Electron Ltd 液処理装置及び液処理方法

Also Published As

Publication number Publication date
JPS639131U (enExample) 1988-01-21

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