JPH0238368Y2 - - Google Patents

Info

Publication number
JPH0238368Y2
JPH0238368Y2 JP1984090999U JP9099984U JPH0238368Y2 JP H0238368 Y2 JPH0238368 Y2 JP H0238368Y2 JP 1984090999 U JP1984090999 U JP 1984090999U JP 9099984 U JP9099984 U JP 9099984U JP H0238368 Y2 JPH0238368 Y2 JP H0238368Y2
Authority
JP
Japan
Prior art keywords
electron beam
signal
cathode ray
ray tube
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984090999U
Other languages
English (en)
Japanese (ja)
Other versions
JPS616252U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9099984U priority Critical patent/JPS616252U/ja
Publication of JPS616252U publication Critical patent/JPS616252U/ja
Application granted granted Critical
Publication of JPH0238368Y2 publication Critical patent/JPH0238368Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP9099984U 1984-06-19 1984-06-19 電子線装置 Granted JPS616252U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9099984U JPS616252U (ja) 1984-06-19 1984-06-19 電子線装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9099984U JPS616252U (ja) 1984-06-19 1984-06-19 電子線装置

Publications (2)

Publication Number Publication Date
JPS616252U JPS616252U (ja) 1986-01-14
JPH0238368Y2 true JPH0238368Y2 (en, 2012) 1990-10-16

Family

ID=30646498

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9099984U Granted JPS616252U (ja) 1984-06-19 1984-06-19 電子線装置

Country Status (1)

Country Link
JP (1) JPS616252U (en, 2012)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54131992A (en) * 1978-04-05 1979-10-13 Hitachi Ltd Scanning type electron microscope

Also Published As

Publication number Publication date
JPS616252U (ja) 1986-01-14

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