JPH0237087B2 - - Google Patents

Info

Publication number
JPH0237087B2
JPH0237087B2 JP61277521A JP27752186A JPH0237087B2 JP H0237087 B2 JPH0237087 B2 JP H0237087B2 JP 61277521 A JP61277521 A JP 61277521A JP 27752186 A JP27752186 A JP 27752186A JP H0237087 B2 JPH0237087 B2 JP H0237087B2
Authority
JP
Japan
Prior art keywords
carbon
substrate
present
film
glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61277521A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62167883A (ja
Inventor
Shunpei Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP56146930A external-priority patent/JPS5848428A/ja
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP27752186A priority Critical patent/JPS62167883A/ja
Publication of JPS62167883A publication Critical patent/JPS62167883A/ja
Publication of JPH0237087B2 publication Critical patent/JPH0237087B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP27752186A 1981-09-17 1986-11-19 炭素被膜を有する複合体の作成方法 Granted JPS62167883A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27752186A JPS62167883A (ja) 1981-09-17 1986-11-19 炭素被膜を有する複合体の作成方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP56146930A JPS5848428A (ja) 1981-09-17 1981-09-17 炭素被膜を有する複合体およびその作製方法
JP27752186A JPS62167883A (ja) 1981-09-17 1986-11-19 炭素被膜を有する複合体の作成方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP56146930A Division JPS5848428A (ja) 1981-09-17 1981-09-17 炭素被膜を有する複合体およびその作製方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP1247416A Division JPH02244045A (ja) 1989-09-22 1989-09-22 フォトマスク

Publications (2)

Publication Number Publication Date
JPS62167883A JPS62167883A (ja) 1987-07-24
JPH0237087B2 true JPH0237087B2 (enrdf_load_stackoverflow) 1990-08-22

Family

ID=26477630

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27752186A Granted JPS62167883A (ja) 1981-09-17 1986-11-19 炭素被膜を有する複合体の作成方法

Country Status (1)

Country Link
JP (1) JPS62167883A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04244198A (ja) * 1991-01-30 1992-09-01 Ozonshiya:Kk 洗浄方法及びオゾン水洗濯機
JPH04103881U (ja) * 1990-09-26 1992-09-08 三星電子株式会社 洗濯機用オゾン発生装置の安全制御装置及び方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5544775A (en) * 1994-12-22 1996-08-13 International Business Machines Corporation Laser machined slider

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50130370A (enrdf_load_stackoverflow) * 1974-04-01 1975-10-15

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04103881U (ja) * 1990-09-26 1992-09-08 三星電子株式会社 洗濯機用オゾン発生装置の安全制御装置及び方法
JPH04244198A (ja) * 1991-01-30 1992-09-01 Ozonshiya:Kk 洗浄方法及びオゾン水洗濯機

Also Published As

Publication number Publication date
JPS62167883A (ja) 1987-07-24

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