JPH0427690B2 - - Google Patents

Info

Publication number
JPH0427690B2
JPH0427690B2 JP61277517A JP27751786A JPH0427690B2 JP H0427690 B2 JPH0427690 B2 JP H0427690B2 JP 61277517 A JP61277517 A JP 61277517A JP 27751786 A JP27751786 A JP 27751786A JP H0427690 B2 JPH0427690 B2 JP H0427690B2
Authority
JP
Japan
Prior art keywords
carbon
gas
carbon film
producing
present
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61277517A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62167885A (ja
Inventor
Shunpei Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP27751786A priority Critical patent/JPS62167885A/ja
Publication of JPS62167885A publication Critical patent/JPS62167885A/ja
Publication of JPH0427690B2 publication Critical patent/JPH0427690B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
  • Formation Of Insulating Films (AREA)
JP27751786A 1986-11-19 1986-11-19 炭素被膜を有する複合体の作製方法 Granted JPS62167885A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27751786A JPS62167885A (ja) 1986-11-19 1986-11-19 炭素被膜を有する複合体の作製方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27751786A JPS62167885A (ja) 1986-11-19 1986-11-19 炭素被膜を有する複合体の作製方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP56146930A Division JPS5848428A (ja) 1981-09-17 1981-09-17 炭素被膜を有する複合体およびその作製方法

Publications (2)

Publication Number Publication Date
JPS62167885A JPS62167885A (ja) 1987-07-24
JPH0427690B2 true JPH0427690B2 (enrdf_load_stackoverflow) 1992-05-12

Family

ID=17584698

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27751786A Granted JPS62167885A (ja) 1986-11-19 1986-11-19 炭素被膜を有する複合体の作製方法

Country Status (1)

Country Link
JP (1) JPS62167885A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5470661A (en) * 1993-01-07 1995-11-28 International Business Machines Corporation Diamond-like carbon films from a hydrocarbon helium plasma
JPH07161646A (ja) * 1993-12-13 1995-06-23 Nec Corp 多結晶膜作成方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1582231A (en) * 1976-08-13 1981-01-07 Nat Res Dev Application of a layer of carbonaceous material to a surface
JPS5578524A (en) * 1978-12-10 1980-06-13 Shunpei Yamazaki Manufacture of semiconductor device

Also Published As

Publication number Publication date
JPS62167885A (ja) 1987-07-24

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